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Characterisation of Interfaces in SiGe Superlatrlces by Combined Grazing Incidence X-Ray Fluorescence and Reflectivity

Published online by Cambridge University Press:  25 February 2011

Adrian R. Powell ,
Jaroslav Bradler ,
Charles R. Thomas ,
Richard A. Kubiak ,
D. Keith Bowen ,
Matthew Wormington  and
John M. Hudson
Adrian R. Powell
Affiliation:
Department of Engineering, University of Warwick, Coventry CV4 7AL, UK
Jaroslav Bradler
Affiliation:
Department of Engineering, University of Warwick, Coventry CV4 7AL, UK
Charles R. Thomas
Affiliation:
Department of Engineering, University of Warwick, Coventry CV4 7AL, UK
Richard A. Kubiak
Affiliation:
Department of Physics, University of Warwick, Coventry CV4 7AL, UK
D. Keith Bowen
Affiliation:
Bede Scientific Software Division, University of Warwick Science Park, Coventry CV4 7EZ, UK
Matthew Wormington
Affiliation:
Bede Scientific Software Division, University of Warwick Science Park, Coventry CV4 7EZ, UK
John M. Hudson
Affiliation:
Department of Physics, University of Durham, South Road, Durham DH3 1LE, UK
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Abstract

X-Ray reflectivity enables the determination of interface and surface roughness along with the variations present in the electron density. Total reflection X-ray fluorescence allows surface analysis with high sensitivity and quantification. By use of grazing angle x-ray fluorescence taken simultaneously with the reflectivity measurements, over a range of angles near the critical angle, it is possible in principle to produce a depth profile of each element, with a composition sensitivity of 0.0002%. A silicon-germanium single layer was used to calibrate the instrument and a Si-Ge 5- period superlattice for a demonstration measurement.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 238: Symposium Cb – Structure and Properties of Interfaces in Materials , 1991 , 653
Copyright
Copyright © Materials Research Society 1992

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References

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