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Characterisation of Diamond-like Carbon by Raman Spectroscopy and Optical Constants

Published online by Cambridge University Press:  15 February 2011

C. Mölßner ,
P. Grant ,
H. Tran ,
G. Clarke ,
D. J. Lockwood ,
H. J. Labbé ,
B. Mason  and
R. Berriche
C. Mölßner
Affiliation:
Swiss Federal Institute of Technology, Lausanne, Switzerland, moessner@dmx.epfl.ch
P. Grant
Affiliation:
Institute for Microstructural Sciences
H. Tran
Affiliation:
Institute for Microstructural Sciences
G. Clarke
Affiliation:
Institute for Microstructural Sciences
D. J. Lockwood
Affiliation:
Institute for Microstructural Sciences
H. J. Labbé
Affiliation:
Institute for Microstructural Sciences
B. Mason
Affiliation:
Institute for Microstructural Sciences
R. Berriche
Affiliation:
Institute for Aerospace Research, National Research Council of Canada, Ottawa, Ont., K1A 0R6, Canada
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Abstract

Crystalline diamond coatings and, increasingly, diamond like amorphous carbon (DLC) films are used for tribological and protective layers for their hardness and chemical inertness. They are also under investigation for their electron emitting properties, with possible applications in field emission displays. DLC films were deposited by laser ablation using a KrF excimer laser and fluences between 0.5 and 2 J/cm2. FTIR measurements did not show the presence of hydrogen in the films. Raman spectra allowed for the determination of the nature of the graphitic and diamond bonds (sp2 and sp3) as well as information about the disorder and short range order in the films. For a better determination of the sp3-content, which is often hidden in the Raman spectra, a correlation with optical properties in the near IR to near UV region was established. These values depended strongly on the substrate temperature and the laser fluence. DLC formation could be demonstrated even at substrate temperatures close to room temperature. Vickers hardness values and first measurements on the electron emissivity of the films can be correlated to the diamond character and the preparation method of the films.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 423: Symposium E – III-Nitride, SiC, and Diamond Materials for Electronic , 1996 , 699
Copyright
Copyright © Materials Research Society 1996

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