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Channeling Investigation of the Lattice Location of Ti in Ti-Implanted Optical Waveguides in LiNbO3
Published online by Cambridge University Press: 26 February 2011
Abstract
Ion channeling of 3 MeV He ions has been employed to investigate the lattice location of Ti in Ti implanted optical waveguides in LiNbO3 after Solid Phase Epitaxy. Particle-Induced X-rays (PIXE) from Ti at 4.5 keY (K∝) and Nb at 2.2 keV (L∝β) and 16.6 keV (K∝) have been detected and analyzed simultaneously.
All scans yield similar behaviour of the Ti and the Nb signals. This provides clear evidence, that within well annealed implanted waveguides the Ti4+ and the Nb5+ ions occupy equivalent lattice positions.
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- Copyright © Materials Research Society 1988
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