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Carbon Atom, Dimer and Trimer Chemistry on Diamond Surfaces from Molecular Dynamics Simulations

Published online by Cambridge University Press:  15 February 2011

Steven M. Valone
Steven M. Valone*
Affiliation:
Materials Science and Technology Division, Los Alamos National Laboratory, Los Alamos, NM 87545, USA.
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Abstract

Spectroscopic investigations of various atmospheres appearing in diamond film synthesis suggest evidence for carbon atoms, dimers or trimers. Molecular dynamics simulations with the Brenner hydrocarbon potential are being used to investigate the elementary reactions of these species on a hydrogen-terminated diamond (111) surface. In principle these types of simulations can be extended to simulations of growth morphologies, in the 1-2 monolayer regime presently.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 389: Symposium R – Modedling and Simulation of Thin-Film Processing , 1995 , 53
Copyright
Copyright © Materials Research Society 1995

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References

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