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Bonding in Ion-Implanted Carbon Films Characterized by TEM Spectrum Lines and Energy-Filtered Imaging

Published online by Cambridge University Press:  10 February 2011

J. Bentley ,
K.C. Walter  and
N.D. Evans
J. Bentley
Affiliation:
Metals and Ceramics Division, Oak Ridge National Laboratory, PO Box 2008, Oak Ridge, TN 37831-6136, bentleyj@ornl.gov
K.C. Walter
Affiliation:
Los Alamos National Laboratory, Los Alamos, NM; now at Southwest Research Institute, San Antonio, TX
N.D. Evans
Affiliation:
Oak Ridge Institute for Science and Education, PO Box 117, Oak Ridge, TN 37830 Metals and Ceramics Division, Oak Ridge National Laboratory, PO Box 2008, Oak Ridge, TN 37831-6136
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Abstract

Ion-implanted diamond-like carbon (DLC) films have been characterized by techniques based on electron energy-loss spectrometry using an imaging energy filter on a 300kV TEM. Nitrogen implantation results in increased sp2 bonding and a 1.3 eV shift to higher binding energies for carbon-K. Argon implantation results in a smaller increase in sp2bonding with no detectable binding energy shift. The fraction of implanted species retained is much smaller for Ar than for N. Differences in behavior between N- and Ar-implanted DLC are consistent with expected chemical reactions. Preliminary results demonstrate the feasibility of mapping the Φ*/σ* intensity (sp2/sp3) ratio by energy-filtered TEM as an alternative to spectrum imaging in STEM mode

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 589 , 1999 , 395
Copyright
Copyright © Materials Research Society 2001

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