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A Bistable Membrane Approach to Micromachined Displays

Published online by Cambridge University Press:  10 February 2011

J.G. Fleming
J.G. Fleming*
Affiliation:
Sandia National Laboratories, MS 1084, P.O. Box 5800, Albuquerque NM 87185. fleminjg@sandia.gov
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Abstract

The fabrication of bistable membrane structures with potential application to projection displays has been demonstrated. The use of a thin film in heavy compression combined with a central pivot point enables the fabrication of devices with two mechanically stable orientations. The demonstration structure consisted of a silicon dioxide membrane, a thin silicon nitride fillet pivot and thin aluminum electrodes. Polysilicon was used as the sacrificial material.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 508: Symposium B – Flat Panel Display Materials - 1998 , January 1998 , 219
Copyright
Copyright © Materials Research Society 1998

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References

1. See for example: Proceedings of the 1997 Conference on Solid-State Sensors and Actuators, Chicago, IEEE Electron Devices Society, NJ, 1997.Google Scholar
2. Hornbeck, L.J., Proc. SPIE Vol. 2783 (1996) p 2–13.Google Scholar