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Atomic-scale Characterization of HF-treated 4H-SiC(0001)1×1 Surfaces by Scanning Tunneling Microscopy

  • Kenta Arima (a1), Hideyuki Hara (a2), Yasuhisa Sano (a3), Keita Yagi (a4), Ryota Okamoto (a5), Junji Murata (a6), Hidekazu Mimura (a7) and Kazuto Yamauchi (a8)...

Abstract

Scanning tunneling microscopy (STM) observations are performed on 4H-SiC(0001) surfaces after wet-chemical preparation steps including HF treatments.1×1 structures are formed on a terrace together with other local structures. Their atomic images are investigated in conjunction with low-energy electron diffraction and electron spectroscopy for chemical analysis. It is suggested that each bright dot forming the 1×1 phase corresponds to an OH-terminated Si atom.

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1. Lin, M. E., Strite, S., Agarwal, A., Salvador, A., Zhou, G. L., Teraguchi, N., Rockett, H., and Morkoc, H., Appl. Phys. Lett. 62, 702 (1993).
2. Tsuchida, H., Kamata, I., and Izumi, K., Jpn. J. Appl. Phys., Part 1 34, 6003 (1995).
3. Starke, U., Bram, Ch., Steiner, P.-R., Hartner, W., Hammer, L., Heinz, K., and Muller, K., Appl. Surf. Sci. 89, 175 (1995).
4. Starke, U., Schardt, J., and Franke, M., Appl. Phys. A, 65, 587 (1997).
5. Måtensson, P., Owman, F., and Johansson, L. I., Phys. Stat. Sol. (b), 202, 501 (1997).
6. King, S. W., Nemanich, R. J., and Davis, R. F., J. Electrochem. Soc. 146, 1910 (1999).
7. Sieber, N., Seyller, Th., Graupner, R., Ley, L., Mikalo, R., Hoffmann, P., Batchelor, D. R., and Schmeifler, D., Appl. Surf. Sci. 184, 278 (2001).
8. Yablonovitch, E., Allara, D. L., Chang, C. C., Gmitter, T., and Bright, T. B., Phys. Rev. Lett. 57, 249 (1986).
9. Hessel, H. E., Feltz, A., Reiter, M., Memmert, U., and Behm, R. J., Chem. Phys. Lett. 186, 275 (1991).
10. Arima, K., Endo, K., Kataoka, T., Oshikane, Y., Inoue, H., and Mori, Y., Appl. Phys. Lett. 76, 463 (2000).
11. Arima, K., Katoh, J., and Endo, K., Appl. Phys. Lett. 85, 6254 (2004).
12. Tsuchida, H., Kamata, I., and Izumi, K., J. Appl. Phys. 85, 3569 (1999).
13. Schardt, J., Brahm, C., Müller, S., Starke, U., Heinz, K., and Müller, K., Suf. Sci. 337, 232 (1995).
14. Brack, K., J. Appl. Phys. 36, 3560 (1965).
15. Kaplan, R. and Parrill, T. M., Surf. Sci. Lett. 165, L45 (1986).
16. Owman, F., Hallin, C., Mårtensson, P., and Janzen, E., J. Crystal. Growth 167, 391 (1996).
17. Hara, H., Sano, Y., Mimura, H., Arima, K., Kubota, A., Yagi, K., and K. Yamauchi, J. Electron. Mat. 35, L11 (2006).
18. Soubatch, S., Saddow, S. E., Rao, S. P., Lee, W. Y., Konuma, M., and Starke, U., Mat. Sci. Forum 483-485, 761 (2005).
19. Watanabe, S., Horiuchi, K., and Ito, T., Jpn. J. Appl. Phys., Part 1 32, 3420 (1993).
20. Kanaya, H., Usuda, K., and Yamada, K., Appl. Phys. Lett. 67, 682 (1995).

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