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Atomic Layer Deposited Al2O3 and Parylene C Bi-layer Encapsulation for Utah Electrode Array Based Neural Interfaces

Published online by Cambridge University Press:  10 March 2014

Xianzong Xie ,
Loren W. Rieth ,
Rohit Sharma ,
Sandeep Negi ,
Rajmohan Bhandari ,
Ryan Caldwell ,
Prashant Tathireddy  and
Florian Solzbacher
Xianzong Xie
Affiliation:
Electrical and Computer Engineering, University of Utah, Salt Lake City, UT, 84112 U.S.A
Loren W. Rieth
Affiliation:
Electrical and Computer Engineering, University of Utah, Salt Lake City, UT, 84112 U.S.A
Rohit Sharma
Affiliation:
Electrical and Computer Engineering, University of Utah, Salt Lake City, UT, 84112 U.S.A
Sandeep Negi
Affiliation:
Electrical and Computer Engineering, University of Utah, Salt Lake City, UT, 84112 U.S.A
Rajmohan Bhandari
Affiliation:
Blackrock microsystems, Salt Lake City, UT, 84108 U.S.A
Ryan Caldwell
Affiliation:
Department of Bioengineering, University of Utah, Salt Lake City, UT, 84112 U.S.A
Prashant Tathireddy
Affiliation:
Electrical and Computer Engineering, University of Utah, Salt Lake City, UT, 84112 U.S.A
Florian Solzbacher
Affiliation:
Electrical and Computer Engineering, University of Utah, Salt Lake City, UT, 84112 U.S.A Department of Bioengineering, University of Utah, Salt Lake City, UT, 84112 U.S.A
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Abstract

Long-term functionality and stability of neural interfaces with complex geometries is one of the major challenges for chronic clinic applications due to lack of effective encapsulation. We present an encapsulation method that combines atomic layer deposited Al2O3 and Parylene C for encapsulation of biomedical implantable devices, focusing on its application on Utah electrode array based neural interfaces. The alumina and Parylene C bi-layer encapsulated wired Utah electrode array showed relatively stable impedance during the 960 equivalent soaking days at 37 °C in phosphate buffered solution. For the bi-layer coated wireless neural interfaces, the power-up frequency was constantly ∼ 910 MHz and the RF signal strength was stably around -73 dBm during equivalent soaking time of 1044 days at 37 °C (still under soak testing).

Keywords

biomedicalatomic layer depositioncoating
Type
Articles
Information
MRS Online Proceedings Library (OPL) , Volume 1621: Symposium H/C/D/J – Advances in Structures, Properties and Applications of Biological and Bioinspired Materials , 2014 , pp. 259 - 265
Copyright
Copyright © Materials Research Society 2014 

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References

REFERENCES

Normann, R. A., “Technology Insight: Future neuroprosthetic therapies for disorders of the nervous system,” Nature Clinical Practice Neurology, vol. 3, pp. 444–452, 2007.CrossRefGoogle ScholarPubMed
Xie, X. Z., Rieth, L., Tathireddy, P., and Solzbacher, F., “Long-term in-vivo Investigation of Parylene-C as Encapsulation Material for Neural Interfaces,” Procedia Engineering, vol. 25, pp. 483–486, 2011.CrossRefGoogle Scholar
Guenther, M., Gerlach, G., Wallmersperger, T., Avula, M. N., Cho, S. H., Xie, X., et al. ., “Smart Hydrogel-Based Biochemical Microsensor Array for Medical Diagnostics,” Advances in Science and Technology, vol. 85, pp. 47–52, 2013.CrossRefGoogle Scholar
Li, W., Rodger, D. C., Menon, P., and Tai, Y. C., “Corrosion Behavior of Parylene-Metal-Parylene Thin Films in Saline,” ECS Transactions, vol. 11, pp. 1–6, 2008.CrossRefGoogle Scholar
Langereis, E., Creatore, M., Heil, S., Van de Sanden, M., and Kessels, W., “Plasma-assisted atomic layer deposition of Al2O3 moisture permeation barriers on polymers,” Applied physics letters, vol. 89, pp. 081915–081915-3, 2006.CrossRefGoogle Scholar
Xie, X., Rieth, L., Merugu, S., Tathireddy, P., and Solzbacher, F., “Plasma-assisted atomic layer deposition of Al2O3 and parylene C bi-layer encapsulation for chronic implantable electronics,” Applied physics letters, vol. 101, pp. 093702 1-5, 2012.CrossRefGoogle Scholar
Xie, X., Rieth, L., Caldwell, R., Diwekar, M., Tathireddy, P., Sharma, R., and Solzbacher, F., “Long-Term Bilayer Encapsulation Performance of Atomic Layer Deposited Al2O3 and Parylene C for Biomedical Implantable Devices,” Biomedical Engineering, IEEE Transactions on, vol. 60, pp. 2943–2951, 2013.Google Scholar
Minnikanti, S., Diao, G., Pancrazio, J. J., Xie, X., Rieth, L., Solzbacher, F., and Peixoto, N., “Lifetime assessment of atomic-layer-deposited Al2O3–Parylene C bilayer coating for neural interfaces using accelerated age testing and electrochemical characterization,” Acta Biomaterialia, vol. 10, pp. 960–967, 2014.CrossRefGoogle ScholarPubMed
Xie, X., Rieth, L., Tathireddy, P., and Solzbacher, F., “Atomic layer deposited Al2O3 and parylene C dual-layer encapsulation for biomedical implantable devices,” in Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII), 2013 Transducers & Eurosensors XXVII: The 17th International Conference on, 2013, pp. 1044–1047.CrossRefGoogle Scholar
Bhandari, R., Negi, S., Rieth, L., and Solzbacher, F., “A wafer-scale etching technique for high aspect ratio implantable MEMS structures,” Sensors and Actuators, A: Physical, vol. 162, pp. 130–136, 2010.CrossRefGoogle ScholarPubMed
Kim, S., Bhandari, R., Klein, M., Negi, S., Rieth, L., Tathireddy, P., Toepper, M., Oppermann, H., and Solzbacher, F., “Integrated wireless neural interface based on the Utah electrode array,” Biomedical microdevices, vol. 11, pp. 453–466, 2009.CrossRefGoogle ScholarPubMed
Xie, X., Rieth, L., Negi, S., Bhandari, R., Caldwell, R., Sharma, R., Tathireddy, P., and Solzbacher, F., “Self-aligned tip deinsulation of atomic layer deposited Al 2 O 3 and parylene C coated Utah electrode array based neural interfaces,” Journal of Micromechanics and Microengineering, vol. 24, p. 035003, 2014.CrossRefGoogle Scholar
Xie, X., Rieth, L., Cardwell, R., Sharma, R., Yoo, J. M., Diweka, M., Tathireddy, P., and Solzbacher, F., “Bi-layer encapsulation of utah array based nerual interfaces by atomic layer deposited Al2O3 and parylene C,” in Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII), 2013 Transducers & Eurosensors XXVII: The 17th International Conference on, 2013, pp. 1267–1270.CrossRefGoogle Scholar
Hemmerich, K., “General aging theory and simplified protocol for accelerated aging of medical devices,” MEDICAL PLASTIC AND BIOMATERIALS, vol. 5, pp. 16–23, 1998.Google Scholar
Harrison, R. R., Kier, R. J., Chestek, C. A., Gilja, V., Nuyujukian, P., Ryu, S., Greger, B., Solzbacher, F., and Shenoy, K. V., “Wireless neural recording with single low-power integrated circuit,” IEEE Transactions on Neural Systems and Rehabilitation Engineering, vol. 17, pp. 322–329, 2009.CrossRefGoogle ScholarPubMed
Hsu, J. M., Rieth, L., Normann, R. A., Tathireddy, P., and Solzbacher, F., “Encapsulation of an integrated neural interface device with Parylene C,” Biomedical Engineering, IEEE Transactions on, vol. 56, pp. 23–29, 2009.CrossRefGoogle ScholarPubMed
Kane, S., Cogan, S., Ehrlich, J., Plante, T., and McCreery, D., “Electrical performance of penetrating microelectrodes chronically implanted in cat cortex,” in Engineering in Medicine and Biology Society, EMBC, 2011 Annual International Conference of the IEEE, 2011, pp. 5416–5419.CrossRefGoogle Scholar
Sharma, A., Rieth, L., Tathireddy, P., Harrison, R., Oppermann, H., Klein, M., et al. ., “Long term in vitro functional stability and recording longevity of fully integrated wireless neural interfaces based on the Utah Slant Electrode Array,” Journal of Neural Engineering, vol. 8, 2011.CrossRefGoogle ScholarPubMed