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Asymmetrical Polysilicon Electrothermal Microactuators for Achieving Large In-Plane Mechanical Forces and Deflections

  • Edward S. Kolesar (a1), Peter B. Allen (a1), Noah C. Boydston (a1), Jeffery T. Howard (a1), Simon Y. Ko (a1), Matthew D. Ruff (a1), Josh M. Wilken (a1) and Richard J. Wilks (a1)...

Abstract

This research focuses on the design and experimental characterization of two types of asym- metrical MEMS electrothermal microactuators. Both MEMS polysilicon electrothermal microac- tuator designs use resistive (Joule) heating to generate thermal expansion and movement. Deflection and force measurements as a function of applied electrical power are presented.

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