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Assessing Ohmic Contacts

Published online by Cambridge University Press:  25 February 2011

H Barry Harrison  and
Geoffery K Reeves
H Barry Harrison
Affiliation:
School of Microelectronic Engineering, Griffith University, Brisbane 4111, Australia
Geoffery K Reeves
Affiliation:
MMTC-RMIT, Melbourne 3000, Australia
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Abstract

This paper reviews specific contact resistivity pc values obtained theoretically and experimently for a range of semiconducting materials. Techniques of obtaining pc values in terms of measurement, accuracy and reproducibility are then considered and matched to the semiconducting materials previously covered.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 260: Symposium C – Advanced Metallization and Processing for Semiconductor Devices and Circuits , 1992 , 31
Copyright
Copyright © Materials Research Society 1992

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References

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