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Application of ZnO to Passivate the GaN-based Device Structures

  • Eliana Kaminska (a1), Anna Piotrowska (a2), Marie-Antoinette di Forte Poisson (a3), Sylvain Delage (a4), Hacene Lahreche (a5), Norbert Kwietniewski (a6), Iwona Pasternak (a7), Renata Kruszka (a8), Marek Guziewicz (a8), Piotr Boguslawski (a9), Elzbieta Dynowska (a10) and Michal Borysiewicz (a11)...

Abstract

The fabrication of high-resistivity ZnO-based thin films lattice-matched to AlGaN/GaN structures has been developed. It relies on low-temperature reactive sputter deposition of ZnO:Sb from ZnSb target. Taking into account the hygroscopic nature of ZnO surface, an additional coating by Si3N4 films is applied to ensure the humidity protecition. The developped passivation suppresses leakage currents in Schottky diods, and substantially improves output characteristics of AlGaN/GaN HEMT.

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1. Kotani, J., Kaneko, M., Hasegawa, H., and Hashizume, T., J. Vac. Sci. Technol. B 24, 2148 (2006).
2. Kordos, P., Kudela, P., Gregusova, D. and Donoval, D., Semicond. Sci. Technol. 21, 1592 (2006).10.1088/0268-1242/21/12/015
3.http://www.hyphen-eu.com
4. Malhotra, S.G., Rek, Z.U., Yalisove, S.M., Bilello, J.C., J. Vac. Sci. Technol. A 15, 345 (1997).10.1116/1.580490
5. Kaminska, E., Przezdziecka, E., Piotrowska, A., Kossut, J., Boguslawski, P., Pasternak, I., Jakiela, R., and Dynowska, E., Properties of p-type ZnO Grown by Oxidation of Zn-group- V Compounds in Zinc Oxide and Related Materials, edited by Christen, J̈rgen, Jagadish, Chennupati, Look, David C., Yao, Takafumi, and Bertram, Frank (Mater. Res. Soc. Symp. Proc. 957, Warrendale, PA, 2007), 0957–K08 (2007).
6. Li, J., Li, B., Zhai, D., Li, S. and Alim, M A, J. Phys. D: Appl. Phys. 39 4969 (2006).

Keywords

Application of ZnO to Passivate the GaN-based Device Structures

  • Eliana Kaminska (a1), Anna Piotrowska (a2), Marie-Antoinette di Forte Poisson (a3), Sylvain Delage (a4), Hacene Lahreche (a5), Norbert Kwietniewski (a6), Iwona Pasternak (a7), Renata Kruszka (a8), Marek Guziewicz (a8), Piotr Boguslawski (a9), Elzbieta Dynowska (a10) and Michal Borysiewicz (a11)...

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