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Application of Electron Spin Resonance as a Tool for Building In Reliability (BIR)

Published online by Cambridge University Press:  15 February 2011

John F. Conley Jr.
John F. Conley Jr.*
Affiliation:
Dynamics Research Corporation, Commercial Systems, 19545 NW Von Neumann Drive, Suite 130, Beaverton, OR 97006-6998
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Abstract

Electron spin resonance and its use as a tool for building reliability into MOS oxides is reviewed.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 428: Symposium L – Materials Reliability in Microelectronics VI , 1996 , 293
Copyright
Copyright © Materials Research Society 1996

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