The thermal diffusivities throughout a composition-spread film comprising La1- xSrxCoO3 series were determined by Transient Reflecting Grating (TRG) measurements. Thermal diffusivities of transparent SrCoO3 film and SrTiO3 substrate were determined by using third harmonics having wavelength of 266 nm as an excitation light with only a certain length of grating spacing. The thermal diffusivities of them were 0.02 and 0.05 cm2/s, respectively. With regard to untransparent thin films, the experiment was performed by setting three kinds of grating spacing for the excitation light having the fundamental wavelength, 800 nm in order to obtain high precision. The distribution profile of obtained values of the thermal diffusivity throughout the sample was traced as 0.06 - 0.18 - 0.01 cm2/s corresponding to the variation of in La1-xSrxCoO3, thus showing a convex profile, however, this anomalous profile was verified by comparing with the data obtained by the X-ray diffractometer.