Skip to main content Accessibility help
×
Home

Annealing Study of Erbium and Oxygen Implanted Gallium Nitride

  • John T. Torvik (a1), Robert J. Feuerstein (a1), Chang H. Qiu (a2), Moeljanto W Leksono (a2), Jacques I. Pankove (a1) (a2) and Fereydoon Namavar (a3)...

Abstract

A systematic study of photoluminescence (PL) of Er and O ion implanted and annealed n-type GaN grown on R-plane sapphire (A12O3) was performed. The Er implants ranged from 2 × 1013 to 1 × 1015 Er++/cm2, and the O co-implants ranged from 1014 to 1016 O+/cm2. The resulting nine different combinations of GaN:Er,O were annealed at 600 °C (4 hrs. in N2), 700 °C (1.5 hrs. in N2), 800 °C (0.75 hr. in NH3), and 900 °C (0.5 hr. in NH3) Following each annealing step, the Er3 -related PL at 1.54 μm was measured from each sample at 77K, when pumped directly with 135 mW of power at 980 nm. The three samples with the highest dose of Er (1 × 1015 Er++/ cm 2), regardless of O co-dopant dose, yielded the strongest PL peak intensity at 1.54 μm after all the anneals. The integrated PL from 1.52 to 1.58 μm was reduced by 62 % when going from 77 K to room temperature (RT).

Copyright

References

Hide All
Ennen, H., Schneider, J., Pomrenke, G., and Axmann, A., Appl. Phvs Lett. 43, 943 (1983),
Nakagome, H., Uwai, K., and Takahei, K., Appl. Phys. Lett 53, 1726 (1988)
3. Miya, T., Terunuma, Y., Hosaka, T., and Miyashita, T, El. Lett 15. 106 (1979).
4. Chang, C. T., El. Lett., 15, 765 (1979), Appl. Opt., 18, 2516 (1979)
5. Digonnet, M. J. F., Rare Earth DopedP Fiber Lasers andAmplifiers, Dekker, New York, 1993.
6. Kimura, T., Isshiki, H., Ishida, H., Yugo, S., Saito, R., Ikoma, T., J Appl. Phys. 76, 3714 (1994).
7. Lomardo, S., Campisano, S. U., van den Hoven, G. N., and Polman, A, J. Appl. Phys. 77, 6504 (1995).
8. Miniscalco, W. J., IEEE/OSAJ. Lightwave Technol., LT–9, 234250 (1991).
9. Wang, X. Z. and Wessels, B. W., Appl. Phys. Lett., 65, 584 (1994)
10. Zheng, B., Michel, J., Ren, F. Y. G., Kimerling, L. C., Jacobson, D. C, and Poate, J. M., Appl. Phys. Lett. 64, 2842 (1994).
11. Franzo, G., Priolo, F., Coffa, S., Polman, A., Camera, A., Appl Phys Lett. 64, 2235 (1994).
12. Eaglesham, D. J., Michel, J., Fixgerald, E. A., Jacobson, D. C., Poate, J. M, Benton, J. L., Polman, A., Xie, Y.-X, and Kimerling, L. C., Appl. Phys. Lett 58, 2797.(1991).
13. Favennec, P. N., L'Haridon, H., Salvi, M., Moutonnet, D., and Guillou, Y. Le, El. Lett. 25, 718 (1989).
14. Favennec, P. N., L'Haridon, H., Moutonnet, D., Salvi, M., and Guillou, Y. Le, Jpn. J. Appl. Phys. 29, L524 (1986).
15. Michel, J., Benton, J. L., Ferrante, R. F., Jacobson, D. C., Eaglesham, D. J., Fitzgerald, E. A., Xie, Y.- H., Poate, J. M., and Kimerling, L. C.. J. Appl. Phys. 70, 2672 (1991).
16. R, Wilson, G., Schwartz, R. N., Abernathy, C. R, Pearton, S. J. Newman, N., Rubin, M., Fu, T., and Zavada, J. M., Appl. Phys. Lett. 65, 992 (1994).
17. Qiu, C. H., Leksono, M. W., Pankove, J. I., Torvik, J. T., Feuerstein, R. J., and Namavar, F., Appl. Phys. Lett. 66, 562 (1995).
18. Choyke, W. J., Devaty, R. P., Clemen, L. L., Yoganathan, M., Pensl, G, and Hassler, Ch., Appl. Phys. Lett. 65, 1668 (1994).

Metrics

Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed