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Analysis of Successive Focused Ion Beam Slices by Scanning Electron Imaging and 3D Reconstruction

  • Terence Yeoh (a1), Neil Ives (a2), Nathan Presser (a3), Gary Stupian (a4), Martin Leung (a5), John McCollum (a6) and Frank Hawley (a7)...

Abstract

An antifuse structure was analyzed using scanning electron microscope imaging and focused ion beam image slicing to generate a form of three-dimensional microscopy. This method reveals nanometer scale features that could not be easily imaged using a single focused ion beam cross-section. A novel end-point detection technique has been developed to control the thickness of the slice to about 2 nm. Voxel imaging and interpretive three-dimensional reconstruction was used to resolve volumes as small as 2 cubic nm3. It was determined that the fusing region for an antifuse is a complex mixture of material phases with an elliptical volume approximately 75 nm in diameter.

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Keywords

Analysis of Successive Focused Ion Beam Slices by Scanning Electron Imaging and 3D Reconstruction

  • Terence Yeoh (a1), Neil Ives (a2), Nathan Presser (a3), Gary Stupian (a4), Martin Leung (a5), John McCollum (a6) and Frank Hawley (a7)...

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