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An Optical Waveguide Formed by Aluminum Nitride thin film on Sapphire

Published online by Cambridge University Press:  10 February 2011

Xiao Tang ,
Yifang Yuan ,
K. Wongchotigul  and
Michael G. Spencer
Xiao Tang
Affiliation:
Materials Science Research Center of Excellence, School of Engineering, Howard University, 2300 6th Street, NW, Washington, DC 20059, spencer@msrce.howard.edu
Yifang Yuan
Affiliation:
Permanent address: East China University of Technology, 516 Jun Gong Road, Shanghai 200093 China
K. Wongchotigul
Affiliation:
Materials Science Research Center of Excellence, School of Engineering, Howard University, 2300 6th Street, NW, Washington, DC 20059, spencer@msrce.howard.edu
Michael G. Spencer
Affiliation:
Materials Science Research Center of Excellence, School of Engineering, Howard University, 2300 6th Street, NW, Washington, DC 20059, spencer@msrce.howard.edu
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Abstract

We have investigated an optical waveguide formed by aluminum nitride (AlN) thin film on sapphire. A good quality AlN thin film on sapphire substrate was prepared by metal organic chemical vapor deposition (MOCVD) in this laboratory. A rutile prism coupler was employed to display the waveguide modes (N-lines) with wavelengths of 632.8, 532.1, 514.5 and 488.0 nm. The refractive index and thickness of the waveguide material is obtained by prism-coupler measurement. The dispersion curve of the AlN film is given and the dispersion equation is derived. The attenuation in the waveguide is evaluated by scattering loss measurements using a fiber probe. The attenuation coefficient alpha (α) is 1.5- 2.1 cm−1 depending on the sample and the different modes of waveguide. The accuracy of the measurement is discussed.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 449: Symposium N – III-V Nitrides , 1996 , 817
Copyright
Copyright © Materials Research Society 1997

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References

REFERENCES

1. Wongchotigul, K. Chen, N., Zhang, D. P., Tang, X. and Spencer, M. G., “Materials Letters,” 26, 223–226 (1996)Google Scholar
2. Nakamura, S., Senoh, M., Nagahama, S., Iwasa, N., Yamada, T., Matasushita, T., Kiyoku, H. and Sugimoto, Y., “Jpn J. Appl. Phys”. 35, L74, (1996)Google Scholar
3. Khan, M.A., et al., “Appl. Phys. Lett.”, 60, 2917, (1992)Google Scholar
4. Ulrich, R. and Torge, R., “Applied Optics” 12, 12, 2901 (1973)Google Scholar
5. Bauer, J., Biste, L., and Bolze, D., “Phys. Stat. Sol. (a)”, 39, 173, (1977)Google Scholar
6. Roskovcova, L., Pastrnak, J., and Babuskova, R., Physica Status Solidi, 20, k29 (1967)Google Scholar