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An Optical Diffraction Microphone with Active Grating Diaphragm

  • Kazuhiro Suzuki (a1), Hideyuki Funaki (a1) and Yujiro Naruse (a1)

Abstract

We present a new conceptual active optical microphone based on complementary metal-oxide semiconductor (CMOS) - micro electro mechanical systems (MEMS) micromachining techniques. The diaphragm of the microphone has a diffracting grating fabricated by the CMOS process with only a small number of post-processes. The active microphone actuates the diaphragm on an arbitrary frequency by electrostatic force, and detects sound waves by the light waves. From the verification experiment result, this active microphone was able to perform advanced functions, such as the amplifier effect and the detection of phase information of sound waves.

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1 Hirayama, M., Nakamura, K. and Ueha, S.: Tech. Dig. Spring Meeting of the Acoustical Society of Japan, 18, Tokyo, 2003 [in Japanese].
2 Takizawa, T., Saito, N. and Yamasaki, Y.: Tech. Dig. Spring Meeting of the Acoustical Society of Japan, 18, Tokyo, 2003 [in Japanese].
3 Suzuki, Y. and Kido, K.: Acoust. Sci. Technol. 25 (2004) 45.
4 Mei, S. H, Zhou, Y., Lam, Y. L and Ruan, F.: Lasers and Electro-Optics, 1999 (CLEO '99. Summaries of Papers Presented at the Conference) p. 432.
5 Deng, J., Xiao, H., Huo, W., Luo, M., May, R., Wang, A., and Liu, Y.: Opt. Technol. 33(2001) 305.
6 Suzuki, K., Funaki, H. and Naruse, Y.: Jpn. J. Appl. Phys. 44 (2005), to be published.

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An Optical Diffraction Microphone with Active Grating Diaphragm

  • Kazuhiro Suzuki (a1), Hideyuki Funaki (a1) and Yujiro Naruse (a1)

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