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An Investigation of a-Si:H Thin Film Transistors by A Comparison of Transient Measurements and Numerical Simulations.

Published online by Cambridge University Press:  21 February 2011

M.F. Willums
Affiliation:
University of Dundee, Dundee DD14HN, Scotland
M. Hack
Affiliation:
Xerox Palo Alto Research Center, Palo Alto, CA 94304, USA
P.G. Lecomber
Affiliation:
University of Dundee, Dundee DD14HN, Scotland
J. Shaw
Affiliation:
Xerox Design Research Institute, Ithaca, NY 14853, USA
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Abstract

Transient measurements of the source-drain current ISD of amorphous silicon (a-Si:H) thin film transistors are compared with the results of two dimensional simulations. In particular, we have investigated the effect of different amorphous silicon layer thicknesses on the transient response. It is found that the dynamic response of a transistor with 0.4 μm a-Si:H is significantly slower than that of a device with only 0.06 μm of a-Si:H.

Type
Research Article
Copyright
Copyright © Materials Research Society 1992

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References

REFERENCES

1. LeComber, P. G., J. Non-CrystaL Solids, 115, 1 (1989).CrossRefGoogle Scholar
2. van Berkei, C., Hughes, J.R. and Powell, M.J., MRS Symp. Proc. 95, 445 (1987).CrossRefGoogle Scholar
3. van Berkei, C., Hughes, J.R. and Powell, M.J., J. Appl Phys 66, 4488 (1989).CrossRefGoogle Scholar
4. Shaw, J. G. and Hack, M., J. Appl Phys. 64(9), 4562 (1988).CrossRefGoogle Scholar
5. Shaw, J.G. and Hack, M., Mater. Res. Soc. Symp. Proc. 118 (1988).CrossRefGoogle Scholar
6. LeComber, P.G. and Spear, W.E., “Semiconductors and Semimetals”, 21D, 89, (1984).CrossRefGoogle Scholar
7. Hack, M., Steemers, H. & Weisfield, R., these proceedings.Google Scholar
8. Lang, D.V., Cohen, J.D. & Harbison, J.P., Phys. Rev. B25, 5285 (1982).CrossRefGoogle Scholar