Skip to main content Accessibility help
×
Home

The Adsorption and Decomposition of Gallane Adducts on GaAs (100)

  • J. S. Foord (a1), A.T.S. Wee (a1), N. K. Singh (a1), T. J. Whitaker (a1) and D. O'Hare (a1)...

Abstract

The adsorption and decomposition of GaH3NMe3 and GaH3PMe3 on GaAs (100) has been investigated using XPS, TDS and molecular beam techniques. Both precursors react in a similar way with the adsorbed layer formed at low temperatures decomposing as the temperature is raised to produce metallic Ga, gaseous gallium hydride(s) and adsorbed hydrogen and the Lewis base, which also undergo desorption. Molecular beam measurements show that both compounds exhibit similar decomposition kinetics and decompose more readily than the aluminium analogues. The results indicate that the site-blocking effects, which prevent the low temperature decomposition of alane adducts, are less significant for the gallane compounds.

Copyright

Corresponding author

* corresponding author.

References

Hide All
1. For a recent review see Sang, W.T., J Cryst. Gr. 120 (1992) 1.
2. Singh, N.K., Foord, J.S., Davies, G.J. and Skevington, P.J., J Cryst. Gr. 120 (1992) 33.
3. Foord, J.S., Singh, N.K., Fitzgerald, E.T., Davies, G J. and Jones, A.C., J Cryst. Gr. 120 (1992) 103.
4. Lee, B.J., Houng, Y.M., Miller, J.N. and Turner, J.E., J Cryst. Gr. 105 (1990) 168.
5. Bohling, D.A., Muhr, G.T., Abernathy, C.R., Jordan, A.S., Pearton, S.J. and Hobson, W.S., J Cryst. Gr. 107 (1991) 1068.
6. Lane, P.A., Freer, R.W., Martin, T., Whitehouse, C. R., Calcott, P.D.J., Jones, A.C. and Rushworth, S. A., Appl. Phys. Lett. 61 (1992) 285.
7. Yamada, T., Iga, R. and Sugiura, H., Jap. Jnl, Appl. Phys. 28 (1989) L1883.
8. Abernathy, C.R., Wisk, P.W., Jones, A.C. and Rushworth, S.A., Appl. Phys. Lett. 61 (1992) 180
9. Murrell, A.J., O'Hare, D., Wee, A.T.S., Whitaker, T.J. and Foord, J.S., Chemtronics 4 (1990) 262
10. Foord, J.S., Whitaker, T.J., O'Hare, D. and Jones, A.C., in preparation
11. Murrell, A. J., Wee, A.T.S., Fairbrother, D.H., Singh, N.K., Foord, J.S., Davies, G.J. and Andrews, D.A., J. Appl. Phys. 68 (1990) 4053
12. Wee, A.T.S., Murrell, A.J., O'Hare, D., Singh, N.K. and Foord, J. S., Vacuum 41 (1990) 968
13. Wee, A.T. S., Sing, N. K. and Foord, J. S., in preparation.

Metrics

Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed