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Zone Descriptions of Film Structure-A Rationale

Published online by Cambridge University Press:  15 February 2011

David A. Smith  and
A. Ibrahim
David A. Smith
Affiliation:
Department of Materials Science and Engineering, Stevens Institute of Technology, Hoboken, NJ 07030
A. Ibrahim
Affiliation:
Department of Materials Science and Engineering, Stevens Institute of Technology, Hoboken, NJ 07030
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Abstract

The Microstructure of films is a result of the interplay of nucleation and growth processes which occur during deposition. A columnar structure is characteristic of films irrespective of the material or the deposition process. The length scale of the microstructure depends systematically on the atomic mobility during growth.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 317: Symposium B – Mechanisms of Thin Film Evolution , 1993 , 401
Copyright
Copyright © Materials Research Society 1994

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References

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