Hostname: page-component-84b7d79bbc-tsvsl Total loading time: 0 Render date: 2024-07-28T18:06:05.782Z Has data issue: false hasContentIssue false
  • English
  • Français

X-Ray Grazing Angle Scattering and Fluorescence Studies of Interfacial Microstructures in Si1-xGex/Si Multilayers

Published online by Cambridge University Press:  25 February 2011

Z. H. Ming ,
A. Krol ,
Y. L. Soo ,
Y. H. Kao ,
J. S. Park  and
K. L. Wang
Z. H. Ming
Affiliation:
State University of New York at Buffalo, Buffalo, NY 14260
A. Krol
Affiliation:
State University of New York at Buffalo, Buffalo, NY 14260
Y. L. Soo
Affiliation:
State University of New York at Buffalo, Buffalo, NY 14260
Y. H. Kao
Affiliation:
State University of New York at Buffalo, Buffalo, NY 14260
J. S. Park
Affiliation:
University of California at Los Angeles, Los Angeles, CA 90024
K. L. Wang
Affiliation:
University of California at Los Angeles, Los Angeles, CA 90024
Get access

Abstract

Angular dependence of grazing incidence x-ray scattering and Ge fluorescence yield were measured for the heterostructures of Si1-xGex/Si and the inverted bilayer Si/Si1-xGex as well as two 10-period superlattices. Interfacial roughness, correlation of height fluctuations between interfaces and Ge density profiles in the multilayers were investigated.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 280: Symposium B – Evolution of Surface and Thin Film Microstructure , 1992 , 261
Copyright
Copyright © Materials Research Society 1993

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

1. Born, M. and Wolf, E., Principles of Optics (Pergamon, New York, 1965);Google Scholar
Parratt, L.G., Phys. Rev. 95, 359 (1954);CrossRefGoogle Scholar
Brauslau, A.B. et al., Phys. Rev. A38, 2457 (1988).CrossRefGoogle Scholar
2. Vidal, B. and Vincent, P., Appl. Opt. 23, 1794 (1984).CrossRefGoogle Scholar
3. Krol, A., Sher, C., and Kao, Y.H., Phys. Rev. B38, 8579 (1988).CrossRefGoogle Scholar
4. Sinha, S.K. et al., Phys. Rev. B38, 2297 (1988).Google Scholar