Skip to main content Accessibility help
×
Home

X-Ray Diffraction Study of a Thin GaAs Film on Si(100)

Published online by Cambridge University Press:  26 February 2011

Arun S. Bommannavar
Affiliation:
Oak Ridge National Laboratory, P. O. Box X, Oak Ridge, TN 37831
C. J. Sparks
Affiliation:
Oak Ridge National Laboratory, P. O. Box X, Oak Ridge, TN 37831
A. Habenschuss
Affiliation:
Oak Ridge National Laboratory, P. O. Box X, Oak Ridge, TN 37831
G. E. Ice
Affiliation:
Oak Ridge National Laboratory, P. O. Box X, Oak Ridge, TN 37831
A. Dhere
Affiliation:
Oak Ridge National Laboratory, P. O. Box X, Oak Ridge, TN 37831
H. Morkoc
Affiliation:
Oak Ridge National Laboratory, P. O. Box X, Oak Ridge, TN 37831
H. Zabel
Affiliation:
University of Illinois, Urbana, IL 61801
Get access

Abstract

A 900A single crystalline GaAs film deposited by molecular beam epitaxy (MBE) on a silicon crystal cut 4.1° from (001) surface was characterized with X-ray diffraction measurements of the mosaic spread, particle size and strain distribution, and lattice parameter. The GaAs film had a larger mosaic spread in the direction of the steps of the silicon surface and coherent particle sizes of about 900 Å compared to the estimated film thickness of approximately 1000 Å. Superlattice reflections gave an ordered domain size of about 330 Å. There is a residual strain gradient in the film which is nearly linear with the lattice constant differing by about 0.044 Å between the surface of the film and its interface with the silicon substrate. Lattice parameter measurements indicate a small expansion of 0.13% perpendicular to the plane of the film.

Type
Research Article
Copyright
Copyright © Materials Research Society 1988

Access options

Get access to the full version of this content by using one of the access options below.

References

1.Neumann, D.A., Zabel, Z., Fischer, R., and Morkoc, H., J. Appl. Phys. 61 (3), 1023 (1987).CrossRefGoogle Scholar
2.Neumann, D.A., Ziaomei, Z., Zabel, H., Henderson, T., Fischer, R., Masselink, W., Klem, J., Peng, C., and Morkoc, H., J. Vac. Sci. Technol. B (USA) 4 (2), 642 (1986).CrossRefGoogle Scholar
3.Habenschuss, A., Ice, G., Sparks, C., and Neiser, R., Nucl. Instrum. Methods 5th National Conference on Synchrotron Radiation Instrumentation, Madison, Wisc., June 1987.Google Scholar
4.Borie, B.S., Acta Crystallogr. 13, 542 (1960); B.S. Borie, C.J. Sparks, and J.V.Cathcart, Acta Metall. 10, 691 (1962); and B.E. Warren in X-Ray Diffraction (Addison-Wesley Publishing Co., Reading, Mass., 1969), Chapter 13.CrossRefGoogle Scholar
5.Cathcart, J.V., Petersen, G.F., and Sparks, C.J., J. Electrochem. Soc. 116 (5), 664 (1969).CrossRefGoogle Scholar
6.Fischer, R., Markoc, H., Newmann, D.A., Zabel, H., Choi, C., Otsuka, N., Longerbone, M., and Erickson, L.P., J. Appl. Phys. 60 (5), 1640 (1986).CrossRefGoogle Scholar

Full text views

Full text views reflects PDF downloads, PDFs sent to Google Drive, Dropbox and Kindle and HTML full text views.

Total number of HTML views: 0
Total number of PDF views: 8 *
View data table for this chart

* Views captured on Cambridge Core between September 2016 - 20th January 2021. This data will be updated every 24 hours.

Hostname: page-component-76cb886bbf-frjnl Total loading time: 0.253 Render date: 2021-01-20T17:19:46.704Z Query parameters: { "hasAccess": "0", "openAccess": "0", "isLogged": "0", "lang": "en" } Feature Flags: { "shouldUseShareProductTool": true, "shouldUseHypothesis": true, "isUnsiloEnabled": true, "metricsAbstractViews": false, "figures": false, "newCiteModal": false }

Send article to Kindle

To send this article to your Kindle, first ensure no-reply@cambridge.org is added to your Approved Personal Document E-mail List under your Personal Document Settings on the Manage Your Content and Devices page of your Amazon account. Then enter the ‘name’ part of your Kindle email address below. Find out more about sending to your Kindle. Find out more about sending to your Kindle.

Note you can select to send to either the @free.kindle.com or @kindle.com variations. ‘@free.kindle.com’ emails are free but can only be sent to your device when it is connected to wi-fi. ‘@kindle.com’ emails can be delivered even when you are not connected to wi-fi, but note that service fees apply.

Find out more about the Kindle Personal Document Service.

X-Ray Diffraction Study of a Thin GaAs Film on Si(100)
Available formats
×

Send article to Dropbox

To send this article to your Dropbox account, please select one or more formats and confirm that you agree to abide by our usage policies. If this is the first time you use this feature, you will be asked to authorise Cambridge Core to connect with your <service> account. Find out more about sending content to Dropbox.

X-Ray Diffraction Study of a Thin GaAs Film on Si(100)
Available formats
×

Send article to Google Drive

To send this article to your Google Drive account, please select one or more formats and confirm that you agree to abide by our usage policies. If this is the first time you use this feature, you will be asked to authorise Cambridge Core to connect with your <service> account. Find out more about sending content to Google Drive.

X-Ray Diffraction Study of a Thin GaAs Film on Si(100)
Available formats
×
×

Reply to: Submit a response


Your details


Conflicting interests

Do you have any conflicting interests? *