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VLS Growth of Position-controlled InP Nanowires and Formation of Radial Heterostructures on Mask-patterned InP Substrates

Published online by Cambridge University Press:  04 February 2014

Kenichi Kawaguchi ,
Hisao Sudo ,
Manabu Matsuda ,
Mitsuru Ekawa ,
Tsuyoshi Yamamoto  and
Yasuhiko Arakawa
Kenichi Kawaguchi
Affiliation:
Fujitsu Laboratories Ltd., 10-1 Morinosato-Wakamiya, Atsugi, 243-0197 Japan.
Hisao Sudo
Affiliation:
Fujitsu Laboratories Ltd., 10-1 Morinosato-Wakamiya, Atsugi, 243-0197 Japan.
Manabu Matsuda
Affiliation:
Fujitsu Laboratories Ltd., 10-1 Morinosato-Wakamiya, Atsugi, 243-0197 Japan.
Mitsuru Ekawa
Affiliation:
Fujitsu Laboratories Ltd., 10-1 Morinosato-Wakamiya, Atsugi, 243-0197 Japan.
Tsuyoshi Yamamoto
Affiliation:
Fujitsu Laboratories Ltd., 10-1 Morinosato-Wakamiya, Atsugi, 243-0197 Japan.
Yasuhiko Arakawa
Affiliation:
INQIE and IIS, The University of Tokyo, 4-6-1 Komaba, Meguro-ku, Tokyo 153-8505, Japan.
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Abstract

Position-controlled InP nanowires (NWs) with separations of 10-100 μm were grown by the vapor-liquid-solid (VLS) method using Au-deposited SiO2-mask-patterned InP substrates. Excess indium species diffused from the large mask region formed plural tilted NW-like structures from single openings in addition to the vertical VLS NWs formed by Au catalyst. The introduction of HCl gas during the NW growth was found to efficiently suppress the tilted NW-like structures. Vertical InP NWs without anomalous growth were successfully formed by controlling the HCl flow rate. Moreover, single InP/InAsP/InP quantum wells (QWs) with wurtzite crystal phase structure were epitaxially grown on the sidewall of the position-controlled InP NWs, and two-dimensional arrayed patterns of photoluminescence (PL) coming from the radial QWs were clearly observed in the 1.3-μm wavelength region at room temperature.

Keywords

crystal growthIII-Vnanostructure
Type
Articles
Information
MRS Online Proceedings Library (OPL) , Volume 1659: Symposium SS/XX – Micro- and Nanoscale Systems – Novel Materials, Structures and Devices , 2014 , pp. 181 - 186
Copyright
Copyright © Materials Research Society 2014 

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