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Toward Elimination of Solvents in Micro/Nanofabrication: Solventless Polymerization and Its Applications

Published online by Cambridge University Press:  15 February 2011

Hongwei Gu
Department of Chemistry
Degang Fu
Department of Chemistry
Chenjie Xu
Department of Chemistry
Jun Tang
Department of Chemistry
Jie Xie
Materials Characterization and Preparation Facility Hong Kong University of Science & Technology Clear Water Bay, Hong Kong (SAR), China
Bing Xu
Department of Chemistry
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Here we report a solventless polymerization process, which involves adding catalysts on the surface of a solid substrate and polymerizing volatile monomers at the gas/solid interface. It provides an alternative to other thin-film-making processes and may lead to reduce or eliminate the use of solvents in micro/nanofabrication. On silicon or silicon dioxide substrates, solventless produced thin films show improved smoothness inside microchannels, and suits reactive ion etching (RIE) process. In addition, this process offers a simple route to generate microstructures that are inaccessible in the presence of solvent, and provides a simple and fast protocol to screen catalysts in a parallel mode.

Research Article
Copyright © Materials Research Society 2003

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