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Synchrotron Radiation Hard X-Ray Microprobe by Multilayer Fresnel Zone Plate

Published online by Cambridge University Press:  10 February 2011

S. Tamura
Affiliation:
Osaka National Research Institute, AIST, Ikeda, Osaka, Japan.
K. Ohtani
Affiliation:
Osaka National Research Institute, AIST, Ikeda, Osaka, Japan.
M. Yasumoto
Affiliation:
Osaka National Research Institute, AIST, Ikeda, Osaka, Japan.
K. Murali
Affiliation:
Osaka National Research Institute, AIST, Ikeda, Osaka, Japan.
N. Kamuo
Affiliation:
Kansai Medical University, Hirakata, Osaka, Japan.
H. Kihara
Affiliation:
Kansai Medical University, Hirakata, Osaka, Japan.
K. Yoshida
Affiliation:
Osaka Institute of Technology, Ohmiya, Asahi-ku, Osaka, Japan.
Y. Suzuki
Affiliation:
Japan Synchrotron Radiation Research Institute, Kamigori, Ako-gun, Hyogo, Japan.
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Abstract

A hard X-ray microbeam with submicrometer spot size from synchrotron radiation (SR) sources is expected to add a new dimension to various X-ray analysis methods. A Fresnel zone plate (FZP) is one of the promising focusing elements for X-rays. In order to develop high performance multilayer FZP for use in the hard X-ray region, Cu/Al concentric multilayers were fabricated by use of a DC sputtering deposition process. Lower Ar gas pressure or higher rotating speed of a wire substrate has been effective in forming smoother multilayer interfaces. From a focusing test of the Cu/Al FZP (100-zones) by the SR (λ= 0.154nm), microbeams of 1.5 μm φ and 0.8 μm φ have been achieved for the first- and third-order focal beams, respectively.

Type
Research Article
Copyright
Copyright © Materials Research Society 1998

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References

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