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Study of Titanium Nitrides Synthesized by High Dose Ion Implantation

Published online by Cambridge University Press:  21 February 2011

M. Guemmaz ,
A. Mosser ,
D. Raiser ,
J.J. Grob ,
A. Cornet  and
S. Paletto
M. Guemmaz
Affiliation:
IPCMS-GSI, 23 roe du Loess, F-67037 STRASBOURG Cedex, France
A. Mosser
Affiliation:
IPCMS-GSI, 23 roe du Loess, F-67037 STRASBOURG Cedex, France
D. Raiser
Affiliation:
IPCMS-GSI, 23 roe du Loess, F-67037 STRASBOURG Cedex, France
J.J. Grob
Affiliation:
PHASE, 23 rue du Loess, F-67037 STRASBOURG Cedex, France
A. Cornet
Affiliation:
ENSAIS-LMCM, 24 boulvard de la Victoire, F-67000 STRASBOURG, France
S. Paletto
Affiliation:
INSA-GEMPPM, 20 avenue Albert Einstein, F-69621 VILLEURBANNE Cedex, France
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Abstract

Polycrystalline titanium samples were implanted with N+ ions at high fluences and at several energies. The aim was to obtain 4000 Â thick nitrided layers of constant nominal concentration equal to 20% ,30%, and 40%.

The results obtained by RBS showed a flat nitrogen distribution with depth and the measured concentrations were respectively 20%,31% and 38%.

X-ray grazing incidence diffraction indicated that, at 20%, a nitrogen solid solution is formed in the a-Ti matrix. At 31% the nitrogen solid solution is present besides a 5-TiN phase and at 38% only the 5-TiN phase remains.

From nanoindentation measurements, we derived the depth-related hardness and Young's modulus of the implanted samples. These values were compared to those found on titanium nitride layers obtained with other coating techniques.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 354: Symposium A – Beam Solid Interactions for Materials Synthesis and Characterization , 1994 , 243
Copyright
Copyright © Materials Research Society 1995

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