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Spray-Deposited Metal Oxide Films with Various Properties for Micro- and Optoelectronic Applications: Growth and Characterization

Published online by Cambridge University Press:  10 February 2011

A. Malik ,
A. Séco ,
R. Nunes ,
M. Vieira ,
E. Fortunato  and
R. Martins
A. Malik
Affiliation:
CEMOP-UNINOVA, R. C.E. Navarro, P-1900 Lisboa, Portugal
A. Séco
Affiliation:
Dep. Chemistry, R. C.E. Navarro, P-1900 Lisboa, Portugal
R. Nunes
Affiliation:
CEMOP-UNINOVA, R. C.E. Navarro, P-1900 Lisboa, Portugal
M. Vieira
Affiliation:
Dep. Electronics, ISEL, R. C.E. Navarro, P-1900 Lisboa, Portugal
E. Fortunato
Affiliation:
Dep. Materials Science, FCT-UNL, Qta. Torre, P-2825 Monte de Caparica, R. C.E. Navarro, P-1900 Lisboa, Portugal
R. Martins
Affiliation:
Dep. Materials Science, FCT-UNL, Qta. Torre, P-2825 Monte de Caparica, R. C.E. Navarro, P-1900 Lisboa, Portugal
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Abstract

This work reports the structure and electro-optical characteristics of different metal oxide films obtained by spray pyrolysis on heated glass substrates, aiming their application in optoelectronic devices. The results show that this technique leads to thin films with properties ranging from dielectric to degenerate semiconductors, offering the following advantages: simplicity, low cost, high productivity and the possibility of covering large areas, highly important for large area device applications.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 471: Symposium G – Flat Panel Display Materials III , 1997 , 47
Copyright
Copyright © Materials Research Society 1997

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References

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