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The Role of Microelectronic Integration In Environmental Control: A Perspective
Published online by Cambridge University Press: 15 February 2011
Abstract
The paper discusses the potential of silicon-based integration of disciplines of microelectronics, microoptics, and micromechanics, (MEOM), to achieve sensor-based smart subsystems for pervasive environmental applications. The author proposes a federally-focused initiative to establish an R & D institute to expedite progress and achieve global industrial leadership.
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- Research Article
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- Copyright © Materials Research Society 1994