Skip to main content Accessibility help
×
Home
Hostname: page-component-559fc8cf4f-sbc4w Total loading time: 0.267 Render date: 2021-03-05T02:03:30.214Z Has data issue: true Feature Flags: { "shouldUseShareProductTool": true, "shouldUseHypothesis": true, "isUnsiloEnabled": true, "metricsAbstractViews": false, "figures": false, "newCiteModal": false, "newCitedByModal": true }

Real-Time Monitoring for Laser Surface Cleaning

Published online by Cambridge University Press:  21 February 2011

Y.F. Lu
Affiliation:
Department of Electrical Engineering, National University of Singapore, 10 Kent Ridge Crescent, Singapore 0511.
M.H. Hong
Affiliation:
Department of Electrical Engineering, National University of Singapore, 10 Kent Ridge Crescent, Singapore 0511.
Y. Aoyagi
Affiliation:
Semiconductor Laboratory, RIKEN, the Institute for Physical and Chemical Research,Wako-shi, Saitama 351-01 Japan.
Get access

Abstract

Real-time monitoring of surface cleanness in laser dry cleaning was investigated by monitoring the acoustic waves emitted from the substrate surface under pulsed laser irradiation. It is found that the acoustic wave from the surface under laser irradiation can reflect the surface condition, i.e., the surface cleanness. Besides the surface condition, the acoustic waveforms also depend on the substrate materials and laser pulse energies (intensities). The frequency spectrum obtained from the Fourier transform can provide clear indication for different surface cleanness. Removing of surface contaminants can generally result in weaker laser-induced acoustic wave and change in the frequency spectrum. The surface cleanness, therefore, can be monitored in real-time by detecting the amplitude and frequency of the acoustic wave during the laser cleaning process. This phenomenon provides the laser cleaning technique a real-time feedback during the cleaning process.

Type
Research Article
Copyright
Copyright © Materials Research Society 1995

Access options

Get access to the full version of this content by using one of the access options below.

References

1 Lu, Y.F., and Aoyagi, Y., Jpn. J. Appl. Phys., Part 2, 33(3B), L430 (1994).CrossRefGoogle Scholar
2 Lu, Y.F., and Aoyagi, Y., MRS Spring Meeting ‘94 (April 4-8, 1994, San Francisco, U.S.A.).Google Scholar
3 Bazylev, P.V., Bondarenko, A.N., and Lugovoi, V.A., Soviet Journal of Nondestructive Testing (English translation of Defektoskopiya), 25(4), 253 (1989).Google Scholar
4 Tilleman, M.M., and Eidelman, S., AIAA Journal 28(3), 396 (1990).CrossRefGoogle Scholar
5 Mei, Z.M., and Yuan, G., Proceedings of SPIE - The International Society for Optical Engineering (v 1229), (Int Soc for Optical Eng., Bellingham, USA, 1990) p. 218.Google Scholar

Full text views

Full text views reflects PDF downloads, PDFs sent to Google Drive, Dropbox and Kindle and HTML full text views.

Total number of HTML views: 0
Total number of PDF views: 6 *
View data table for this chart

* Views captured on Cambridge Core between September 2016 - 5th March 2021. This data will be updated every 24 hours.

Send article to Kindle

To send this article to your Kindle, first ensure no-reply@cambridge.org is added to your Approved Personal Document E-mail List under your Personal Document Settings on the Manage Your Content and Devices page of your Amazon account. Then enter the ‘name’ part of your Kindle email address below. Find out more about sending to your Kindle. Find out more about sending to your Kindle.

Note you can select to send to either the @free.kindle.com or @kindle.com variations. ‘@free.kindle.com’ emails are free but can only be sent to your device when it is connected to wi-fi. ‘@kindle.com’ emails can be delivered even when you are not connected to wi-fi, but note that service fees apply.

Find out more about the Kindle Personal Document Service.

Real-Time Monitoring for Laser Surface Cleaning
Available formats
×

Send article to Dropbox

To send this article to your Dropbox account, please select one or more formats and confirm that you agree to abide by our usage policies. If this is the first time you use this feature, you will be asked to authorise Cambridge Core to connect with your <service> account. Find out more about sending content to Dropbox.

Real-Time Monitoring for Laser Surface Cleaning
Available formats
×

Send article to Google Drive

To send this article to your Google Drive account, please select one or more formats and confirm that you agree to abide by our usage policies. If this is the first time you use this feature, you will be asked to authorise Cambridge Core to connect with your <service> account. Find out more about sending content to Google Drive.

Real-Time Monitoring for Laser Surface Cleaning
Available formats
×
×

Reply to: Submit a response


Your details


Conflicting interests

Do you have any conflicting interests? *