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The Realization of Molecular Control Over Solid State Structure: Chemical Vapor Deposition of Gallium and Indium Sulfide Films
Published online by Cambridge University Press: 22 February 2011
Abstract
The chemical vapor deposition of cubic gallium sulfide and tetragonalindium sulfide films is reported. The structure of the deposited films was demonstrated to be defined not solely by thermodynamics, but bythe predesigned molecular motif of the precursor molecules. Analysis of the deposited films has been obtained by transmission electron microscopy (TEM), with associated energy dispersive X-ray analysis (EDX) and X-ray photoelectron spectroscopy (XPS).
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- Copyright © Materials Research Society 1993
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