Skip to main content Accessibility help
×
Home
Hostname: page-component-684bc48f8b-g7stk Total loading time: 0.37 Render date: 2021-04-14T01:27:27.330Z Has data issue: true Feature Flags: { "shouldUseShareProductTool": true, "shouldUseHypothesis": true, "isUnsiloEnabled": true, "metricsAbstractViews": false, "figures": false, "newCiteModal": false, "newCitedByModal": true }

Optical Characteristics of Amorphous III-V Nitride Thin Films

Published online by Cambridge University Press:  01 February 2011

Jebreel M. Khoshman
Affiliation:
Department of Physics & Astronomy, Condensed Matter & Surface Science Program, Ohio University, Athens, OH 45701
Martin E. Kordesch
Affiliation:
Department of Physics & Astronomy, Condensed Matter & Surface Science Program, Ohio University, Athens, OH 45701
Get access

Abstract

The optical constants and polarized optical properties of amorphous III-V nitride thin films, a-(Al, Ga, In) N, deposited by RF magnetron sputtering onto crystalline silicon, c-Si, (111) and glass substrates have been investigated over the wavelength range 300 – 1400 nm. The optical constants of a-AlN were obtained by analysis of the measured ellipsometric spectra through the Cauchy–Urbach model while the optical constants of a-(In, Ga) N were determined using the Tauc-Lorentz model. Analysis of the absorption coefficient of a-AlN (in the range 200 – 1400 nm) and a-GaN (in the range 300 – 1400 nm) show the optical bandgap to be 5.9 ± 0.05 and 3.44 ± 0.05 eV. The absorption coefficient of a-InN (in the range 300 – 1400 nm) as a function of photon energy shows the absorption edge to be about 1.74 ± 0.05 eV. From the angle dependence of the p-polarized reflectivity we deduced Brewster and principal angles of these films. Measurement of the polarized optical properties revealed a high transmissivity (70 % – 95 %) and low absorptivity (< 18 %) for all three thin films in the visible and near infrared regions.

Type
Research Article
Copyright
Copyright © Materials Research Society 2005

Access options

Get access to the full version of this content by using one of the access options below.

References

1. Woollam, J. A., Johs, B., Herzinger, C. M., Hilfiker, J., Synowicki, R., and Bungay, C. L., Critical Reviews CR 72, 3 (1999).Google Scholar
2. Richardson, H. H., Van Patten, P. G., Richardson, D. R., and Kordesch, M. E., Appl. Phys. Lett. 80, 2207 (2002).CrossRefGoogle Scholar
3. Azzam, R. M. and Bashara, N. M., Ellipsometry and Polarized Light, (North-Holland Publishing, New York, 1983).Google Scholar
4. Herzinger, C. M., Johs, B., McGahan, W. A., Woollam, J. A., and Paulson, W., J. Appl. Phys. 83, 3323 (1998).CrossRefGoogle Scholar
5. Gurumurugan, K., Chen, Hong, Harp, G. R., Jadwisienczak, W. M., and Lozykowski, H. J., Appl. Phys. Lett. 74, 3008 (1999).CrossRefGoogle Scholar
6. Capan, R., Chaure, N. B., Hassan, A. K., and Ray, A. K., Semicond. Sci. Technol. 19, 198 (2004).CrossRefGoogle Scholar
7. Forouhi, A. R. and Bloomer, I., Phys. Rev. B 34, 7018 (1986).CrossRefGoogle Scholar
8. Jellison, G. E. and Modine, F. A., Appl. Phys. Lett. 69, 371 (1996).CrossRefGoogle Scholar
9. Mohammad, S. N. and Morkoc, H., Progress in Quantum Electronics 20, 5 and 6 (1996).CrossRefGoogle Scholar
10. Jellison, G. E., Modine, F. A., Doshi, P., and Rohatgi, A., Thin Solid Films 313–314, 193 (1998).CrossRefGoogle Scholar
11. Ikuta, K., Inoue, Y., and Takai, O., Thin Solid Films 334, 49 (1998).CrossRefGoogle Scholar
12. Chen, H., Chen, K., Drabold, D. A., and Kordesch, M. E., Appl. Phys. Lett. 77, 1117 (2000).CrossRefGoogle Scholar
13. Cody, G. D., Tiedje, T., Abeles, B., Brooks, B., and Goldstein, Y., Phys. Rev. Lett. 47, 1480 (1981).CrossRefGoogle Scholar

Full text views

Full text views reflects PDF downloads, PDFs sent to Google Drive, Dropbox and Kindle and HTML full text views.

Total number of HTML views: 0
Total number of PDF views: 5 *
View data table for this chart

* Views captured on Cambridge Core between September 2016 - 14th April 2021. This data will be updated every 24 hours.

Send article to Kindle

To send this article to your Kindle, first ensure no-reply@cambridge.org is added to your Approved Personal Document E-mail List under your Personal Document Settings on the Manage Your Content and Devices page of your Amazon account. Then enter the ‘name’ part of your Kindle email address below. Find out more about sending to your Kindle. Find out more about sending to your Kindle.

Note you can select to send to either the @free.kindle.com or @kindle.com variations. ‘@free.kindle.com’ emails are free but can only be sent to your device when it is connected to wi-fi. ‘@kindle.com’ emails can be delivered even when you are not connected to wi-fi, but note that service fees apply.

Find out more about the Kindle Personal Document Service.

Optical Characteristics of Amorphous III-V Nitride Thin Films
Available formats
×

Send article to Dropbox

To send this article to your Dropbox account, please select one or more formats and confirm that you agree to abide by our usage policies. If this is the first time you use this feature, you will be asked to authorise Cambridge Core to connect with your <service> account. Find out more about sending content to Dropbox.

Optical Characteristics of Amorphous III-V Nitride Thin Films
Available formats
×

Send article to Google Drive

To send this article to your Google Drive account, please select one or more formats and confirm that you agree to abide by our usage policies. If this is the first time you use this feature, you will be asked to authorise Cambridge Core to connect with your <service> account. Find out more about sending content to Google Drive.

Optical Characteristics of Amorphous III-V Nitride Thin Films
Available formats
×
×

Reply to: Submit a response


Your details


Conflicting interests

Do you have any conflicting interests? *