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Observation of Micro-Tensile Behavior of Thin Film TiN and Au using ESPI Technique

Published online by Cambridge University Press:  01 February 2011

Yong-Hak Huh
Affiliation:
Environment & Safety Research Center, Korea Research Institute of standards and Science, P.O. Box 102, Yuseong, Daejon, 305-600, Korea, E-mail:yhhuh@kriss.re.kr
Dong-Iel Kim
Affiliation:
Department of Mechanical Engineering, Chonnam National University
Jun-Hee Hahn
Affiliation:
Environment & Safety Research Center, Korea Research Institute of standards and Science, P.O. Box 102, Yuseong, Daejon, 305-600, Korea, E-mail:yhhuh@kriss.re.kr
Gwang-Seok Kim
Affiliation:
Environment & Safety Research Center, Korea Research Institute of standards and Science, P.O. Box 102, Yuseong, Daejon, 305-600, Korea, E-mail:yhhuh@kriss.re.kr
Chang-Doo Kee
Affiliation:
Department of Mechanical Engineering, Chonnam National University
Soon-Chang Yeon
Affiliation:
School of Mechanical and Aerospace Engineering, Seoul National University
Yong Hyub Kim
Affiliation:
School of Mechanical and Aerospace Engineering, Seoul National University
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Abstract

Micro-tensile properties of hard and soft thin films, TiN and Au, were evaluated by directly measuring tensile strain in film tension using the micro-ESPI(electronic Speckle Pattern Interferometry) technique. Micro-tensile stress-strain curves for these films were obtained and the properties were determined. TiN thin film 1 μm thick and Au films with two different thicknesses (t=0.5 μm and 1 μm) were deposited onto the silicon wafers, respectively, and micro-tensile specimens wide 50, 100 and 200 μm were fabricated using micromachining. In-situ measurement of the micro-tensile strain during tensile loading was carried out using the subsequent strain measurement algorithm and the ESPI system developed in this study. The micro-tensile curves showed that TiN thin film was a linear-elastic material showing no plastic deformation and Au thin film was an elastic-plastic material showing significant plastic flow. Effect of the specimen dimensions on mechanical properties was examined. It was revealed that tensile strengths for both films were slightly increased with increasing specimen width. Furthermore, variations of yielding strengths for the thin film Au with change of the dimension were investigated.

Type
Research Article
Copyright
Copyright © Materials Research Society 2005

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