Hostname: page-component-848d4c4894-pftt2 Total loading time: 0 Render date: 2024-05-23T21:25:51.979Z Has data issue: false hasContentIssue false

Observation and Annealing of Incomplete Recrystallized Junction Defects due to the Excimer Laser Beam Diffraction at the Gate Edge in Poly-Si TFT

Published online by Cambridge University Press:  01 February 2011

Woo-Jin Nam
Affiliation:
School of Electrical Engineering, Seoul National University, Seoul, 151-742, Korea
Kee-Chan Park
Affiliation:
School of Electrical Engineering, Seoul National University, Seoul, 151-742, Korea
Sang-Hoon Jung
Affiliation:
School of Electrical Engineering, Seoul National University, Seoul, 151-742, Korea
Soo-Jeong Park
Affiliation:
School of Electrical Engineering, Seoul National University, Seoul, 151-742, Korea
Min-Koo Han
Affiliation:
School of Electrical Engineering, Seoul National University, Seoul, 151-742, Korea
Get access

Abstract

Incomplete recrystallized junction defects of self-aligned, excimer laser annealed polycrystalline silicon (poly-Si) thin film transistor (TFT) was investigated by high-resolution transmission electron microscopy (HR-TEM). TEM observation and simulation result verify that the laser irradiation intensity decreased remarkably at the junction due to diffraction of laser beam at gate electrode edge. We proposed oblique-incidence excimer laser annealing method and successfully eliminated the residual junction defects.

Type
Research Article
Copyright
Copyright © Materials Research Society 2003

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

1. Mimura, A., Ohwada, J.I., Hosokawa, Y., T. Suzuki Kawakami, H. and Miyata, K., IEEE Trans. Elec. Dev. 35, 418 (1988)Google Scholar
2. Park, K.C., Kim, J.S., Nam, W.J. and Han, M.K., Mater. Res. Soc. Spring Meeting (2002)Google Scholar
3. Moller, K.D., OPTICS, (University Science Books, Mill Valley, CA, 1988) pp. 172.Google Scholar
4. Tahkubo, Y. et al, Japan Display 89, pp. 584587 (1989)Google Scholar