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Nanostructured Oxide Films for High-Speed Humidity Sensors

Published online by Cambridge University Press:  01 February 2011

John J. Steele ,
Kenneth D. Harris  and
Michael J. Brett
John J. Steele
Affiliation:
Department of Electrical and Computer Engineering, University of Alberta Edmonton, Alberta, T6G 2V4, Canada.
Kenneth D. Harris
Affiliation:
Department of Electrical and Computer Engineering, University of Alberta Edmonton, Alberta, T6G 2V4, Canada.
Michael J. Brett
Affiliation:
Department of Electrical and Computer Engineering, University of Alberta Edmonton, Alberta, T6G 2V4, Canada.
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Abstract

Miniaturized thin film humidity sensors were fabricated using nanostructured materials deposited by an advanced technique known as glancing angle deposition (GLAD). These sensors exhibited extremely fast desorption response times of less than 40 ms to steplike changes in humidity. Multiple response time measurements for various initial humidities have shown that the sensors maintain their rapid response at all levels of humidity.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 788: Symposium L – Continuous Nanophase and Nanostructured Materials , 2003 , L11.4
Copyright
Copyright © Materials Research Society 2004

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