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Nanofabrication Based on Ion Beam-Laser Interactions with Self-Assembly of Nanoparticles

Published online by Cambridge University Press:  01 February 2011

Naoki Kishimoto ,
K. Saito ,
Jin Pan ,
H. Wang  and
Y. Takeda
Naoki Kishimoto
Affiliation:
KISHIMOTO.Naoki@nims.go.jp, National Institute for Materials Science, Quantum Beam Center, 3-13 Sakura, Tsukuba, 305-0003, Japan, 81-29-863-5433, 81-29-863-5571
K. Saito
Affiliation:
KISHIMOTO.Naoki@nims.go.jp, National Institute for Materials Science, Quantum Beam Center, 3-13 Sakura, Tsukuba, 305-0003, Japan
Jin Pan
Affiliation:
KISHIMOTO.Naoki@nims.go.jp, Univ. of Tsukuba, Tsukuba, N/A, Japan
H. Wang
Affiliation:
KISHIMOTO.Naoki@nims.go.up, National Institute for Materials Science, Quantum Beam Center, 3-13 Sakura, Tsukuba, 305-0003, Japan
Y. Takeda
Affiliation:
KISHIMOTO.Naoki@nims.go.up, National Institute for Materials Science, Quantum Beam Center, 3-13 Sakura, Tsukuba, 305-0003, Japan
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Abstract

Ion beam-based techniques offer various possibilities for robust spatial control of nanoparticles. Since ion implantation is inherently good at depth control of solutes or nanoparticles, additional lateral control may lead to 3D control of nanoparticles. We pursue a lateral-control method of nanoparticle assembly by controlling photon-energy field under ion implantation. Laser is irradiated into a-SiO2, either sequentially or simultaneously with ion implantation. Ions of 60 keV Cu- or 3 MeV Cu2+ and photons of 532 nm are used to study effects on nanoparticle evolution. Simultaneous laser irradiation under ion implantation enhances surface plasmon resonance (SPR), i.e., nanoparticle precipitation, while sequential laser irradiation of 532 nm tends to cause a decay of SPR, i.e., dissolution of Cu nanoparticles. The energy-field perturbation of laser, interactive with nanoparticle evolution, can be used for controlling nanoparticle assembly.

Keywords

particulatenanoscaleion-implantation
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 1020: Symposium GG – Ion-Beam-Based Nanofabrication , 2007 , 1020-GG06-06
Copyright
Copyright © Materials Research Society 2007

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