Hostname: page-component-84b7d79bbc-2l2gl Total loading time: 0 Render date: 2024-07-26T09:34:59.343Z Has data issue: false hasContentIssue false

Morphologies of Solid Surfaces Produced far from Equilibrium

Published online by Cambridge University Press:  26 February 2011

R. Stanley Williams
Affiliation:
Department of Chemistry andBiochemistry University of California Los AngelesLos Angeles, CA 90024-1569
Robijn Bruinsma
Affiliation:
Department of PhysicsUniversity of California Los AngelesLos Angeles, CA 90024-1547
Joseph Rudnick
Affiliation:
Department of PhysicsUniversity of California Los AngelesLos Angeles, CA 90024-1547
Get access

Abstract

We present the first quantitative experimental study of the morphology of amorphous solid surfaces formed by non-equilibrium processes and compare the results with theories developed to explain the formation of such surfaces.

Type
Research Article
Copyright
Copyright © Materials Research Society 1992

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

1. Vossen, J. L. and Kern, W., Thin-Film Processes (Academic Press, New York, 1978).Google Scholar
2. Grovenor, C. R. M., Hentzell, H.T.Z. and Smith, D.A., Acta Met. 32, 773, (1984).Google Scholar
3. Messier, R., Giri, A. P and Roy, R. A, J. Vac. Sci. Technol. A 2, 500, (1984).Google Scholar
4. Burton, W. K., Cabrera, N. and Frank, F. C., Phil. Trans. Roy. Soc. (London) A 243, 299, (1951).Google Scholar
5. Burton, W. K. and Cabrera, N., Disc. Farad. Soc. 5, 38,40 (1949).Google Scholar
6. Hodgkinson, I. J. and Wilson, P.W., CRC Crit. Rev. Sol. State and Mat. Sci 15 27 (1988).CrossRefGoogle Scholar
7. Movchan, B. A and Demchishin, A. V., Phys. Met. Metallogr. 28, 83, (1969).Google Scholar
8. Thornton, J. A, Ann. Rev. Mat. Sci. 7, 239, (1977).Google Scholar
9. Wade, R. H. and Silcox, J, Appl. Phys. Lett. 8, 7, (1966).CrossRefGoogle Scholar
10. Dirks, A. and Leamy, H.J., Thin Solid Films 47, 219, (1977).Google Scholar
11. Nieuwenhuisen, J.M. and Haanstra, H. B., Phillips Tech. Rev. 27, 87, (1966).Google Scholar
12. Messier, R. and Yehoda, J.E., J. Appl Phys. 58, 3739, (1985).CrossRefGoogle Scholar
13. Yehoda, J.E. and Messier, R., Appl. Surf. Sci. 22/23, 590, (1985).Google Scholar
14. Messier, R. and Ross, R.C., J. Appl Phys. 53, 6220, (1982).Google Scholar
15. Moss, S.C. and Graczyk, J. F., Phys.Rev.Lett. 23, 1167 (1969); M.H. Brodsky and R.S.Title, Phys.Rev.Lett. 23, 581 (1969) and F.L. Galeener, Phys.Rev.Lett. 27, 1716 (1971)Google Scholar
16. Leamy, H.J. and Dirks, A. G., J. Appl Phys. 49 (6), 3430 (1978).CrossRefGoogle Scholar
17. Konig, H. and Helwig, G., Optik 6, 111 (1950); L. Reimer, Optik 14, 83, (1957).Google Scholar
18. Herring, C., J. Appl Phys. 21, 301 (1950) and in Structure and Properties of Solid Surfaces, eds. Gomer, R. and Smith, C.S. (University of Chicago, Chicago, 1953), pp. 572, see discussion on pg. 64.Google Scholar
19. Rossnagel, S.M., in Erosion and Growth of Solids Stimulated by Atom and Ion Beams, Kiriakidis, G., Carter, G. and Whitton, J. L., eds. (Martinus Nijhoff, Dordrect, 1986),pp. 181199.CrossRefGoogle Scholar
20. Williams, R.S., Nelson, R.J. and Schlier, A.R., Appl. Phys. Lett. 36, 827 (1980), for a review, D.D. Vvedensky, S. Clarke, K.J. Hugill, A.K. Myers-Beaghton and M.R. Nilly in Kinetics of Ordering and Growth of Surfaces, NATO, A S I Series, 239, ed. M. Lagally (Plenum, New york, 1990).CrossRefGoogle Scholar
21. Gilmer, G.H. and Jackson, K. A., Crystal Growth and Materials, eds. Kaldis, E. and Scheel, H. J., North Holland, Amsterdam, 1977).Google Scholar
22. Palmer, B.J. and Gordon, R. G., Thin Solid Films, 158, 313 (1988); G.S. Bales, A. C. Redfield and A. Zangwill, Phys.Rev.Lett. 62, 776, (1989).Google Scholar
23. Ghaisas, S.V. and Madhukar, A., J. Appl Phys. 65, 1888 (1989), and references therein.CrossRefGoogle Scholar
24. Rasigni, M., Rasigni, G., Varnier, F., Dussert, C., Palmari, J., and Mayani, N., “Statistical Analysis of Rough and Random Surfaces,” in Surface Measurement and Characterization, Bennett, J. M., ed., Proc. SPIE 1009, pp. 6876 (1989).Google Scholar
25. Void, M.J., J. Colloid Interface Sci. 14, 168, (1959).Google Scholar
26. Leamy, H.J. and Gilmer, G.H., Current Topics in Materials Science, 6, Kaldis, E., ed. (North-Holland, Amsterdam, 1980), pp. 309344.Google Scholar
27. Meakin, P., J. Colloid Interface Sci. 105, 240 (1985); D. Bensimon, B. Shraiman and S.Liang, Phys. Lett., A102, 238, (1984).Google Scholar
28. Meakin, P., CRC Critical Reviews in Solid State and Materials Science 13, 143, (1987).Google Scholar
29. Ball, R. C. and Whitten, T., Phys. Rev. A29, 2966, (1984).Google Scholar
30. Muller, K.H., J. Appl. Phys. 58, 2573, (1985).CrossRefGoogle Scholar
31. Family, F., J. Phys. A19, (1986) L441.Google Scholar
32. Srolovitz, D. J., J. Vac. Sci. Technol. A 4, 2925, (1986).Google Scholar
33. Ling, S. and Anderson, M.P., J. Electr. Mat. 17, 459, (1988).Google Scholar
34. Carter, G., Erosion and Growth of Solids Stimulated by Atom and Ion Beams, Kiriakidis, G., Carter, G. and Whitton, J.L., eds. (Martinus Nijhoff, Dordrect, 1986), pp. 7097.Google Scholar
35. Bader, H.P. and Larden, M. A, J. Vac. Sci. Technol. B4, 833, (1986).CrossRefGoogle Scholar
36. Lichter, S. and Chen, J., Phys.Rev.Lett. 56, 1396, (1986).Google Scholar
37. Mazor, A., Srolovitz, D.J., Hagen, P.S. and Bukiet, B. G., Phys.Rev.Lett. 60, 424, (1988).Google Scholar
38.For a recent review: Family, F., Physica A, 168, 5 61 (1990).Google Scholar
39. Family, F. and Vicsek, T., J. Phys. A18, L75 (1985).Google Scholar
40. Family, F., Universalities in Condensed Matter Physics, Jullien, R., Peliti, L., Rammal, R. and Boccara, N., eds., (Springer Proc. Phys.Springer Berlin, 1988).Google Scholar
41. Vicsek, T., Fractal Growth Phenomena (World Scientific, Singapore, 1989)CrossRefGoogle Scholar
42. Kardar, M., Parisi, G. and Zhang, Y.C., Phys.Rev.Lett. 56, 889, (1986).CrossRefGoogle Scholar
43. Meakin, P. and Jullien, R., J. Phys. (Paris) 48, 1651, (1987).Google Scholar
44. Jullien, R. and Meakin, P., Europhys. Lett. 4, 1385, (1987).CrossRefGoogle Scholar
45. Plischke, M., Racz, Z. and Liu, D., Phys. Rev. B35, 3485, (1987).Google Scholar
46. Liu, D. and Plischke, M., Phys. Rev. B38, 4781, (1988).Google Scholar
47. Krug, J. and Spohn, H., Phys. Rev. A38, 4271, (1988).Google Scholar
48. Jullien, R. and Botet, R., J. Phys. A18, 2279, (1985).Google Scholar
49. Zabolitzky, J. G. and Stauffer, D., Phys. Rev. A34, 1523 (1986); Phys.Rev.Lett. 57, 1809, (1986).Google Scholar
50. Kertesz, J. and Wolf, D. E., J. Phys., A21, 747, (1988).Google Scholar
51. Wolf, D. E. and Kertesz, J., Europhys. Lett. 4, 651, (1987).Google Scholar
52. Kim, J. M. and Kosterlitz, J. M., Phys.Rev.Lett. 62, 2289, (1989).Google Scholar
53. Wolf, D. E. and Kosterlitz, J. M., Phys.Rev.Lett. 62, 2571, (1989).Google Scholar
54. Amar, J. and Family, F., Phys.Rev.Lett. 64,543 (1990).Google Scholar
55. Sun, T., Guo, H. and Grant, M., Phys. Rev. A40, 6763, (1989).CrossRefGoogle Scholar
56. Yan, H., Kessler, D. and Sander, L. M., preprint (1989).Google Scholar
57. Edwards, S. F. and Wilkinson, D. R., Proc. R. Soc. London, A381, 17, (1982).Google Scholar
58.For experimental tests of the scaling theory see for instance; Rubio, M. A., Dougherty, C. A. EdwardsA. and Gollub, J. P., Phys.Rev.Lett. 63, 1685, (1985).Google Scholar
59. Mullins, W. W., J. Appl Phys. 28, 333, (1957).Google Scholar
60. Karunasiri, R. P. U., Bruinsma, R. and Rudnick, J., Phys.Rev.Lett. 62, 788, (1989).Google Scholar
61. Bruinsma, R., Karunasiri, R. P. U. and Rudnick, J., Kinetics of Ordering and Growth at Surfaces, NATO A S I, Series B, 239, Lagally, M., ed. (Plenum, 1990).Google Scholar
62. Bales, G. S., Bruinsma, R., Eklund, E. A., Karunasiri, R.P.U., Rudnick, J. and Zangwill, A., Science 249, 264, (1990).CrossRefGoogle Scholar
63. Bales, G. S. and Zangwill, A., Phys.Rev.Lett. 63, 692 (1989); J. Vac. Sci. Technol.(to be published).Google Scholar
64. Tang, C., Bruinsma, R. and Alexander, S., Phys.Rev.Lett. 64, 772, (1990).Google Scholar
65. Medina, E., Hwa, T., Kardar, M. and Zhang, Y., Phys. Rev. A39, 3053, (1989).Google Scholar
66. Golubovic, L. and Bruinsma, R., Phys.Rev.Lett. 66,321 (1991).Google Scholar
67.For conservative (thermal) noise, Eq. 5 was investigated in ref. 55.Google Scholar
68. Golubovic, L. and Karunasiri, R. P. U., submitted to Phys.Rev.Lett.Google Scholar
69. Nakhodkin, N. G., Shaldervan, A. I., Baramid, A. F., and Chenakin, S. P., Thin Solid Films 34, 21, (1976).Google Scholar
70. Moss, S. C. and Graczyk, J. F., Phys. Rev. Lett. 23, 1167, (1969).Google Scholar
71. Cargill, G. S. III, Phys. Rev. Lett. 28, 1372, (1972).CrossRefGoogle Scholar
72. Rasigni, G., Rasigni, M., Vamier, F., Palmari, J., Palmari, J. P. and Llebaria, A., Surf. Sci. 162, 985, (1985).Google Scholar
73. Rasigni, M., Rasigni, G., Varnier, F., Dussert, C., Palmari, J., Mayani, N. and Llebaria, A., SPIE 1009 (Surface Measurement and Characterization), 68 (1988).Google Scholar
74. Hansma, P. K. and Tersoff, J., J. Appl. Phys. 61 (2), RI (1987).Google Scholar
75. Rohrer, H., in Scanning Tunneling Microscopy and Related Methods, Behm, R. J., Garcia, N., and Rohrer, H., eds. (Kluwer Acadedmic Publishers, Dordrecht: 1990), pp. 126.Google Scholar
76. Denley, D. R., J. Vac. Sci. Technol. A 8 (1) 603 (1990).Google Scholar
77. Schönenberger, C., Alvarado, S. F., and Ortiz, C., J. Appl. Phys. 66 (9) 4258 (1989).CrossRefGoogle Scholar
78. , Poirier and White, J. M., private communication.Google Scholar
79. Mitchell, M. W. and Bonnell, Dawn A., J. Mats. Res. 5, 2244, (1990).Google Scholar
80. Wilson, I. H., Zheung, N. J., Knipping, U. and Tsong, I. S. T.,Phys. Rev. B 38, 8444, (1988).CrossRefGoogle Scholar
81. Wilson, I. H., Zheung, N. J., Knipping, U. and Tsong, I. S. T., J. Vac. Sci. Technol. A 7, 2840, (1989).Google Scholar
82. Wilson, I. H., Zheung, N. J., Knipping, U. and Tsong, I. S. T., Appl. Phys. Lett. 53, 2039, (1988).Google Scholar
83. Kojima, I., Fukumoto, N., and Kurahashi, M., J. Electron Spectrosc. Relat. Phenom. 50, c9 (1990).Google Scholar
84. Shen, T. C., Brockenbrough, R. T., Hubacek, J. S., Tecker, J. R., and Lyding, J. W., J. Vac. Sci. Technol. B 9, 1376, (1991).Google Scholar
85. Porte, L., Phaner, M., deVilleneuve, C. H., Moncoffre, N. and Tousset, J., Nucl Instrum. Meth. Phys. Res. B 44, 116, (1989).Google Scholar
86. Coratger, R., Claverie, A., Ajustron, F., and Beauvillain, J., Surf. Sci. 227, 7, (1990).Google Scholar
87. Porte, L., deVilleneuve, C. H. and Phaner, M., J. Vac. Sci. Technol. B 9, 1064, (1991).Google Scholar
88. Michely, Th., Besocke, K. H., and Comsa, G., Surf. Sci. Lett. 230, L135 (1990).Google Scholar
89. Michely, Th. and Comsa, G., J. Vac. Sci. Technol. B 9, 862, (1991).Google Scholar
90. Hirooka, Y., Conn, R. W., Sketchley, T., Leung, W. K., Chevalier, G., Doerner, R., Elverum, J., Goebel, D. M., Gunner, G., Khandagle, M., Labombard, B., Lehmer, R., Luong, P., Ra, Y., Schmiotz, L., and Tynan, G., J. Vac. Sci. Tech. A8, 1790, (1990).Google Scholar
91. Rabalais, J. W. and Kasi, S., Science 239, 623, (1988).Google Scholar
92.For example, Carbon Fibers, Filaments and Composites, Figueirdo, J. L., Bemardo, C. A., Baker, R. T. K. and Huttinger, K. J., eds. (Kluwer Academic Publishers, Dordrecht: 1990), pp. 169440.Google Scholar
93. Snyder, E. J., Eklund, E. A., and Williams, R. S., Surf. Sci. Lett. 239, L487 (1990).Google Scholar
94. Loenen, E. J. van, D. Dijkkamp, Hoeven, A. J., Lenssinck, J. M., and Dieleman, J., Appl. Phys. Lett. 56 (18) 1755 (1990).Google Scholar
95. Ziegler, J. F., Biersack, J. P., and Littmark, U., The Stopping and Range of Ions in Solids, (Pergammon Press, New York: 1985).Google Scholar
96. Kelly, R., in Ion Bombardment Modification of Surfaces, Auciello, O. and Kelly, R., eds. (Elsevier, Amsterdam: 1984), pp. 53.Google Scholar
97. Eklund, E. A., Bruinsma, R., Rudnick, J. and Williams, R. S., submitted to Phys. Rev. Lett.Google Scholar
98. Eklund, E. A., Ph.D. thesis, University of California, 1991.Google Scholar