Skip to main content Accessibility help
×
Home
Hostname: page-component-684bc48f8b-kbg4c Total loading time: 0.897 Render date: 2021-04-11T11:53:52.767Z Has data issue: true Feature Flags: { "shouldUseShareProductTool": true, "shouldUseHypothesis": true, "isUnsiloEnabled": true, "metricsAbstractViews": false, "figures": false, "newCiteModal": false, "newCitedByModal": true }

Modification of InN Properties by Interactions with Hydrogen and Nitrogen

Published online by Cambridge University Press:  01 February 2011

Maria Losurdo
Affiliation:
maria.losurdo@ba.imip.cnr.it, IMIP-CNR, PLASMACHEMISTRY, VIA ORABONA 4, BARI, BARI, 70125, Italy, +39.0805443562, +39.0805442024
Maria Michela Giangregorio
Affiliation:
michelaria.giangregorio@ba.imip.cnr.it
Giovanni Bruno
Affiliation:
giovanni.bruno@ba.imip.cnr.it, IMIP-CNR, PLASMACHEMISTRY, Italy
Tong-Ho Kim
Affiliation:
thkim@ee.duke.edu, Duke University, Electrical and Comp Engin, United States
Pae Wu
Affiliation:
pcw5@duke.edu, Duke University, Electrical and Comp Engin, United States
Soojeong Choi
Affiliation:
sjchoi@phys.duke.edu, Duke University, Electrical and Comp Engin, United States
Mike Morse
Affiliation:
mag18@duke.edu, Duke University, Electrical and Comp Engin, United States
April Brown
Affiliation:
abrown@ee.duke.edu, Duke University, Electrical and Comp Engin, United States
Francesco Masia
Affiliation:
francesco.masia@roma1.infn.it, Universita La Sapienza, Physics, Italy
Antonio Polimeni
Affiliation:
antonio.polimeni@roma1.infn.it, Universita La Sapienza, Physics, Italy
Mario Capizzi
Affiliation:
mario.capizzi@roma1.infn.it, Universita La Sapienza, Physics, Italy
Get access

Abstract

The interaction of InN epitaxial films grown by r.f. plasma assisted molecular beam epitaxy with atomic hydrogen and nitrogen, produced by remote r.f. H2 and N2 plasmas, is investigated. InN strongly reacts with both atomic hydrogen and nitrogen yielding depletion of nitrogen and concurrent formation of In clusters. The impact of hydrogen treatments on the optical properties of InN is assessed using photoluminescence (PL). It is found that hydrogen suppresses the intense PL band peaked at approximately 0.7eV for the as-grown InN epitaxial layers, and results in the appearance of a new PL band whose peak energy and intensity increase with H-dose. The effect of exposure to atomic hydrogen and nitrogen on electrical properties of InN is investigated using Hall effect measurements. Atomic force microscopy is also used for studying the morphological changes of InN upon interaction with atomic hydrogen and nitrogen.

Type
Research Article
Copyright
Copyright © Materials Research Society 2006

Access options

Get access to the full version of this content by using one of the access options below.

References

1. Wu, J., Walukiewicz, W., Yu, K.M., Ager, J.W. III, Haller, E.E., Lu, H., Schaff, W.J., Saito, Y., Nanishi, Y., Appl. Phys. Lett. 80, 3967 (2002).CrossRefGoogle Scholar
2. Wu, J., Walukiewicz, W., Li, S.X., Armitage, R., Ho, J.C., Weber, E.R., Haller, E.E., Lu, H., Schaff, W.J., Barcz, A., Jakiela, R., Appl. Phys. Lett. 84, 2805 (2004).CrossRefGoogle Scholar
3. Limpijumnong, S., Van de Walle, C.G., Phys. Stat. Sol. 228, 303 (2001).3.0.CO;2-A>CrossRef3.0.CO;2-A>Google Scholar
4. Stampfl, C., Van de Walle, C.G., Vogel, D., Kruger, P., Pollmann, J., Phys. Rev. B 61, R7846, (2000).CrossRefGoogle Scholar
5. Wu, J., Walukiewicz, W., Superlattices Microstruct. 34, 63 (2003).CrossRefGoogle Scholar
6. Brown, A.S., Kim, T.H., Choi, S., Wu, P., Morse, M., Losurdo, M., Giangregorio, M.M., Bruno, G., Moto, A., Phys. Stat. Sol. (2006) ), Proc. of Int. Conf. Nitr. Sem. ICNS6, Bremen, Germany Google Scholar
7. Losurdo, M., Giangregorio, M.M., Capezzuto, P., Bruno, G., Namkoong, G., Doolittle, W.A., Brown, A.S., J. Appl. Phys. 95, 8408 (2004).CrossRefGoogle Scholar
8. Losurdo, M., Capezzuto, P., Bruno, G., Irene, E.A., Phys. Rev. B 58, 15878 (1998).CrossRefGoogle Scholar
9. Losurdo, M., Bruno, G., Kim, T.H., Choi, S., Brown, A.S., Appl. Phys. Lett. (2006).Google Scholar
10. Kasic, A., Valcheva, E., Monemar, B., Lu, H., Shaff, W.J., Phys. Rev. B 70, 115217 (2004).CrossRefGoogle Scholar
11. Drago, M., Schmidtling, T., Pohl, U.W., Peters, S., Richter, W., Phys. Stat. Sol. (c) 0, 2842 (2003).CrossRefGoogle Scholar
12. Gries, W.H., Surf. Interf. Analysis, 24, 38 (1996).3.0.CO;2-H>CrossRef3.0.CO;2-H>Google Scholar
13. Hong, J.W., Park, S., Khim, Z.G., Rev. Sci. Instr. 70, 1735 (1999).CrossRefGoogle Scholar
14. Losurdo, M., Giangregorio, M., Capezzuto, P., Bruno, G., Namkoong, G., Doolittle, W.A., Brown, A., J. Appl. Phys. 95, 8408 (2004).CrossRefGoogle Scholar
15. Sato, M., Jpn. J. Appl. Phys. 36, L658 (1997).CrossRefGoogle Scholar
16. Jenkins, D.W., Dow, J.D., Phys. Rev. B 39, 3317 (1989).Google Scholar

Full text views

Full text views reflects PDF downloads, PDFs sent to Google Drive, Dropbox and Kindle and HTML full text views.

Total number of HTML views: 0
Total number of PDF views: 8 *
View data table for this chart

* Views captured on Cambridge Core between September 2016 - 11th April 2021. This data will be updated every 24 hours.

Send article to Kindle

To send this article to your Kindle, first ensure no-reply@cambridge.org is added to your Approved Personal Document E-mail List under your Personal Document Settings on the Manage Your Content and Devices page of your Amazon account. Then enter the ‘name’ part of your Kindle email address below. Find out more about sending to your Kindle. Find out more about sending to your Kindle.

Note you can select to send to either the @free.kindle.com or @kindle.com variations. ‘@free.kindle.com’ emails are free but can only be sent to your device when it is connected to wi-fi. ‘@kindle.com’ emails can be delivered even when you are not connected to wi-fi, but note that service fees apply.

Find out more about the Kindle Personal Document Service.

Modification of InN Properties by Interactions with Hydrogen and Nitrogen
Available formats
×

Send article to Dropbox

To send this article to your Dropbox account, please select one or more formats and confirm that you agree to abide by our usage policies. If this is the first time you use this feature, you will be asked to authorise Cambridge Core to connect with your <service> account. Find out more about sending content to Dropbox.

Modification of InN Properties by Interactions with Hydrogen and Nitrogen
Available formats
×

Send article to Google Drive

To send this article to your Google Drive account, please select one or more formats and confirm that you agree to abide by our usage policies. If this is the first time you use this feature, you will be asked to authorise Cambridge Core to connect with your <service> account. Find out more about sending content to Google Drive.

Modification of InN Properties by Interactions with Hydrogen and Nitrogen
Available formats
×
×

Reply to: Submit a response


Your details


Conflicting interests

Do you have any conflicting interests? *