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A Metal-Alloy Process for the Formation of Oxide Superconducting Films: Advantages, Problems Substrate Interactions, Buffer Layers

Published online by Cambridge University Press:  28 February 2011

M. Gurvitch  and
A. T. Fiory
M. Gurvitch
Affiliation:
AT&T Bell Laboratories, Murray Hill NJ 07974
A. T. Fiory
Affiliation:
AT&T Bell Laboratories, Murray Hill NJ 07974
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Abstract

Most thin film processes developed for the formation of the new cuprate superconductors involve admixture of oxygen during film growth, followed by a subsequent anneal in O2 at high temperatures in order to form the correct phase. We completely separated the two processes by first depositing a metallic alloy of YBa2Cu3 by DC magnetron sputtering, taking full advantage of the ease of calibration and high rates of deposition typical of metals, and then performing a second oxidation and annealing step in an Oo furnace. A potential problem of the attack by ambient moisture on the highly reactive metallic alloy was handled by use of thin Y overlayers. We examined substrate interactions of our films and identified several favorable combinations of substrates and protective buffer layers, such as ZrO2 /Ag and MgO/Nb.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 99: Symposium AA – High-Temperature Superconductors , 1987 , 297
Copyright
Copyright © Materials Research Society 1988

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References

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