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Mechanical Properties of Pyrolytic "SiOCN" Thin Coatings

Published online by Cambridge University Press:  15 February 2011

Sandrine Bec ,
André Tonck  and
Jean-Luc Loubet
Sandrine Bec
Affiliation:
Laboratoire de Tribologie et Dynamique des Systèmes, URA CNRS 855, Ecole Centrale de Lyon, B.P. 163, 69131 ECULLY Cedex, FRANCE
André Tonck
Affiliation:
Laboratoire de Tribologie et Dynamique des Systèmes, URA CNRS 855, Ecole Centrale de Lyon, B.P. 163, 69131 ECULLY Cedex, FRANCE
Jean-Luc Loubet
Affiliation:
Laboratoire de Tribologie et Dynamique des Systèmes, URA CNRS 855, Ecole Centrale de Lyon, B.P. 163, 69131 ECULLY Cedex, FRANCE
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Abstract

Pyrolysis of polymer precursors (polysilazane) is a technologically and economically interesting way to produce thin ceramic coatings. However, many cracks appear and decohesion occurs during pyrolysis when the ceramic coatings (SiOCN) are thicker than 0.5 micrometers. In order to understand these cracking phenomena, the coatings are mechanically characterized by nanoindentation at different stages of the pyrolysis heat treatment.

During pyrolysis, the cracking temperature is detected by in-situ optical observation. The thickness of the coatings varies during pyrolysis from 3 micrometers at the polymeric state to 1 micrometer at the ceramic state. The coatings' properties, hardness and Young's modulus are evaluated after heat treatment, taking into account the substrate's influence. A large variation of these properties occurs at the cracking temperature. Both the hardness and the Young's modulus are multiplied by a factor of 10. By analysing these results, we show that cracking is correlated with the evolution of the coatings' mechanical properties during the transformation.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 308: Symposium M1 – Thin Films: Stresses and Mechanical Properties IV , 1993 , 577
Copyright
Copyright © Materials Research Society 1993

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References

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