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Measurement of Micromechanical Properties Using Atomic Force Microscope with Capacitative
Published online by Cambridge University Press: 22 February 2011
Abstract
A new UHV atomic force microscope for the study of micromechanical properties is described. A capacitance technique is used, which enables simultaneous measurement of forces perpendicular and parallel to the surface (i.e., load and friction), and has low noise down to frequencies below 0.1 Hz. Preliminary results for Ir- and W-tips sliding on graphite and silicon, respectively, demonstrate the capabilities of this new instrument.
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- Copyright © Materials Research Society 1989
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