Hostname: page-component-7bb8b95d7b-cx56b Total loading time: 0 Render date: 2024-09-11T12:32:40.205Z Has data issue: false hasContentIssue false
  • English
  • Français

Laser-Stimulated Noble Metal Deposition From Gaseous and Condensed Acetylacetonates. Photoreactions in the Supersonic Jet and Above Silicon

Published online by Cambridge University Press:  26 February 2011

Joachim Heidberg ,
Rahman Daghighi-Ruhi ,
Hanns Von Weyssenhoff  and
Achim Habekost
Joachim Heidberg
Affiliation:
Institut für Physikalische Chemie und Elektrochemie, Universität Hannover, Callinstr. 3-3A, D-3000 Hannover 1, F.R. Germany
Rahman Daghighi-Ruhi
Affiliation:
Institut für Physikalische Chemie und Elektrochemie, Universität Hannover, Callinstr. 3-3A, D-3000 Hannover 1, F.R. Germany
Hanns Von Weyssenhoff
Affiliation:
Institut für Physikalische Chemie und Elektrochemie, Universität Hannover, Callinstr. 3-3A, D-3000 Hannover 1, F.R. Germany
Achim Habekost
Affiliation:
Institut für Physikalische Chemie und Elektrochemie, Universität Hannover, Callinstr. 3-3A, D-3000 Hannover 1, F.R. Germany
Get access

Abstract

Laser-stimulated deposition from the acetylacetonates of Pt and Ir has been found to take place on silicon surfaces. The gas phase photoreactions have been observed in a supersonic free jet TOF mass spectrometer and above silicon. The bare metal ions and metal cluster ions are formed from the complexes in the gas by multiphoton excitation. On the substrates deposits are detected by microprobe analysis with a metal content higher than 95 %. Also from condensed complexes laser-induced metal deposition, and as competitive process photodesorption, takes place.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 101: Symposium B – Laser and Particle-Beam Chemical Processing for Microelectronics , 1987 , 221
Copyright
Copyright © Materials Research Society 1998

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

1 a) Johnson, A.W., Ehrlich, D.J. and Schlossberg, H.R., Eds., Laser-Controlled Chemical Processing of Surfaces, North-Holland, New York, Amterdam, Oxford, Materials Research Society Symposia Proceedings, Vol. 29, 1984 b) D.J. Ehrlich and J.Y. Tsao, J. Vac. Sei. Technol. B1_, 969 (1983). c) T.F. Deutsch, D.J. Ehrlich and R.M. Osgood, Appl. Phys. Lett. 35, 175 (1979).Google Scholar
2 Bäuerle, D., Chemical Processing with Lasers, Springer-Verlag, Berlin, Heidelberg, New York, 1986.Google Scholar
3 a) Schröder, H., Gianinoni, I., Masci, D. and Kompa, K.L., in Laser Processing and Diagnostics, edited by Bäuerle, D., Springer-Verlag, Berlin, Heidelberg, New York, 1984, pp. 257. b) D. Braichotte and H. van den Bergh, ibid, pp. 183. c) H.H. Gilgen, C.J. Chen, R. Krchnarek and R.M. Osgood, ibid, pp. 225 and in Appl. Phys. B42, 55 (1987). d) C.R. Jones, C.A. Kovac, T.H. Baum and F.A. Houle, Appl. Phys. Lett. 46, 97 (1985). e) F.A. Houle, C.R. Jones, C. Pico and C.A. Kovac, Appl. Phys. Lett. 46, 204, (1985). f) T.H. Baum and C.R. Jones, J. Vac. Soi, Technol. B4, 1187 (1986). g) L. Baufay, M. Wautelet, A. Pigeolet and R. Andrew, Ref. [1], pp 283-Google Scholar
4 a) Hollingsworth, W.E. and Vaida, V., J. Phys. Chem. 90, 1235 (1986). b) A. Freedman and R. Bersohn, J. Am. Chem. Soc. 100, 4116 (1978). c) R.L. Whetten, K.J. Fu and E.R. Grant, J. Chem. Phys. 77, 3769 (1982). d) A. Gedanken and M.B. Robin, J. Phys. Chem. 86, 4096 (1982).Google Scholar
5 Heidberg, J., Stein, H., Riehl, E., Szilâgyi, Z. and Weiss, H., Surf. Sci. 158, 553 (1985).Google Scholar
6 Heidberg, J., Stein, H., Riehl, E., in Vibrations at Surfaces, edited by Caudano, R., Gilles, J.-M. and Lucas, A.A. (Plenum Press, New York, 1982) PP. 17.Google Scholar
7 Heidberg, J., Desorption by Resonant Laser Adsorbate Vibrational Coupling, the 17th Jerusalem Symposium in Quantum Chemistry and Biochemistry 1984 on “Dynamics of Molecule-Surface Interactions”, Invited Lecture. J. Heidberg, H. Stein, Z. Szilâgyi, D. Hoge and H. Weiss, in. Proc. 17th Jerusalem Symp. in Quantum Chemistry and Biochemistry 1984, Dyna-mics on Surfaces. Eds. B. Gerber, J. Jortner, A. Nitzan and B. Pullman (Reidel, Dordrecht, 1984) pp. 329.Google Scholar