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Ion Irradiation Induced Grain Growth in Metal Thin Films

Published online by Cambridge University Press:  26 February 2011

Joyce. C. Liu  and
J. W. Mayer
Joyce. C. Liu
Affiliation:
Department of Materials Science and Engineering, Cornell University, Ithaca, NY 14853
J. W. Mayer
Affiliation:
Department of Materials Science and Engineering, Cornell University, Ithaca, NY 14853
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Abstract

The dependence of ion irradiation induced grain growth on collision and material properties were studied in metal and alloy thin films. The uniform grain size increased with ion dose in the low dose regime; and the growth saturated in the high dose regime. The saturated grain size was determined 'by the cascade dimension as well as the atomic mobility. The growth was further influenced by the temperature, composition and impurity.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 100: Symposium – A Fundamentals of Beam-Solid Interactions and Transient Thermal Processing , 1988 , 357
Copyright
Copyright © Materials Research Society 1988

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References

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