Skip to main content Accessibility help
×
Home

Ion Implantation At Elevated Temperatures*

Published online by Cambridge University Press:  26 February 2011

Nghi Q. Lam
Affiliation:
Argonne National Laboratory, 9700 S. Cass Ave., Argonne, IL 60439
Gary K. Leaf
Affiliation:
Argonne National Laboratory, 9700 S. Cass Ave., Argonne, IL 60439
Get access

Abstract

A kinetic model has been developed to investigate the synergistic effects of radiation-enhanced diffusion, radiation-induced segregation and preferential sputtering on the spatial redistribution of implanted solutes during implantation at elevated temperatures. Sample calculations were performed for Al+ and Si+ ions implanted into Ni. With the present model, the influence of various implantation parameters on the evolution of implant concentration profiles could be examined in detail.

Type
Research Article
Copyright
Copyright © Materials Research Society 1985

Access options

Get access to the full version of this content by using one of the access options below.

Footnotes

*

Work supported by the U. S. Department of Energy, BES-Materials Sciences, and BES-Applied Mathematical Sciences, under Contract W-31-109-Eng-38.

References

1. Johnson, R. A. and Lam, N. Q., Phys. Rev. B13, 4364 (1976).CrossRefGoogle Scholar
2. Barbu, A., Acta Metall. 28, 499 (1980).CrossRefGoogle Scholar
3. Lam, N. Q. and Leaf-, G. K., submitted to J. Mater. Res.Google Scholar
4. Hindmarsh, A. C., in: Scientific Computing, eds. Stepleman, R. S. et al. (North-Holland, Amsterdam, 1983) p. 55.Google Scholar
5. Biersack, J. P. and Haggmark, L. G., Nucl. Instr. Methods 174, 257 (1980).CrossRefGoogle Scholar
6. Andersen, H. H. and Bay, H. L., in Sputtering by Particle Bombardment, ed. Behrisch, R. (Springer, Heidelberg, 1981) p. 145.CrossRefGoogle Scholar
7. Okamoto, P. R., Rehn, L. E. and Averback, R. S., J. Nucl. Mater. 133 & 134, 373 (1985).CrossRefGoogle Scholar
8. Lam, N. Q., Okamoto, P. R. and Johnson, R. A., J. Nucl. Mater. 74, 101 (1978).CrossRefGoogle Scholar
9. Lam, N. Q., Janghorban, K. and Ardell, A. J., J. Nucl. Mater. 101, 314 (1981).CrossRefGoogle Scholar
10. Mayer, S. G. B., Milillo, F. F. and Potter, D. I., Mat. Res. Soc. Symp. Proc. 39, 521 (1985).CrossRefGoogle Scholar

Full text views

Full text views reflects PDF downloads, PDFs sent to Google Drive, Dropbox and Kindle and HTML full text views.

Total number of HTML views: 0
Total number of PDF views: 6 *
View data table for this chart

* Views captured on Cambridge Core between September 2016 - 17th January 2021. This data will be updated every 24 hours.

Hostname: page-component-77fc7d77f9-zjqt5 Total loading time: 0.92 Render date: 2021-01-17T23:13:55.005Z Query parameters: { "hasAccess": "0", "openAccess": "0", "isLogged": "0", "lang": "en" } Feature Flags last update: Sun Jan 17 2021 22:54:41 GMT+0000 (Coordinated Universal Time) Feature Flags: { "metrics": true, "metricsAbstractViews": false, "peerReview": true, "crossMark": true, "comments": true, "relatedCommentaries": true, "subject": true, "clr": true, "languageSwitch": true, "figures": false, "newCiteModal": false, "shouldUseShareProductTool": true, "shouldUseHypothesis": true, "isUnsiloEnabled": true }

Send article to Kindle

To send this article to your Kindle, first ensure no-reply@cambridge.org is added to your Approved Personal Document E-mail List under your Personal Document Settings on the Manage Your Content and Devices page of your Amazon account. Then enter the ‘name’ part of your Kindle email address below. Find out more about sending to your Kindle. Find out more about sending to your Kindle.

Note you can select to send to either the @free.kindle.com or @kindle.com variations. ‘@free.kindle.com’ emails are free but can only be sent to your device when it is connected to wi-fi. ‘@kindle.com’ emails can be delivered even when you are not connected to wi-fi, but note that service fees apply.

Find out more about the Kindle Personal Document Service.

Ion Implantation At Elevated Temperatures*
Available formats
×

Send article to Dropbox

To send this article to your Dropbox account, please select one or more formats and confirm that you agree to abide by our usage policies. If this is the first time you use this feature, you will be asked to authorise Cambridge Core to connect with your <service> account. Find out more about sending content to Dropbox.

Ion Implantation At Elevated Temperatures*
Available formats
×

Send article to Google Drive

To send this article to your Google Drive account, please select one or more formats and confirm that you agree to abide by our usage policies. If this is the first time you use this feature, you will be asked to authorise Cambridge Core to connect with your <service> account. Find out more about sending content to Google Drive.

Ion Implantation At Elevated Temperatures*
Available formats
×
×

Reply to: Submit a response


Your details


Conflicting interests

Do you have any conflicting interests? *