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The Influence of Target-Substrate Bias on Pulsed Laser Deposited Yba2Cu307-6

Published online by Cambridge University Press:  28 February 2011

D.B. Chrisey
Affiliation:
Naval Research Laboratory, Washington, D.C. 20375‐5000
J.S. Horwitz
Affiliation:
Naval Research Laboratory, Washington, D.C. 20375‐5000
K.S. Grabowski
Affiliation:
Naval Research Laboratory, Washington, D.C. 20375‐5000
M.E. Reeves
Affiliation:
Naval Research Laboratory, Washington, D.C. 20375‐5000
M.S. Osofsky
Affiliation:
Naval Research Laboratory, Washington, D.C. 20375‐5000
C.R. Gossett
Affiliation:
Naval Research Laboratory, Washington, D.C. 20375‐5000
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Abstract

We have deposited YBa2Cu307.$ thin films onto <100> SrTi03 substrates at 700°C as a function of target‐substrate bias (0 to 300 V) in order to make use of the positive ions in the laser produced plume to assist in the deposition. The films were extensively characterized to determine differences in film properties (composition, structure, and transport). The results suggest that film properties were optimized at or near a target‐substrate bias of 100 V, although, the differences in film properties were within the margin of reproducibility.

Type
Research Article
Copyright
Copyright © Materials Research Society 1990

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References

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The Influence of Target-Substrate Bias on Pulsed Laser Deposited Yba2Cu307-6
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