Hostname: page-component-848d4c4894-8kt4b Total loading time: 0 Render date: 2024-06-17T08:38:32.636Z Has data issue: false hasContentIssue false

Fracture Strength of Thin Ceramic Membranes

Published online by Cambridge University Press:  22 February 2011

J. Alexander Liddle
Affiliation:
AT&T Bell Laboratories, Murray Hill, NJ 07974
H.A. Huggins
Affiliation:
AT&T Bell Laboratories, Murray Hill, NJ 07974
P. Mulgrew
Affiliation:
AT&T Bell Laboratories, Murray Hill, NJ 07974
L.R. Harriott
Affiliation:
AT&T Bell Laboratories, Murray Hill, NJ 07974
H.H. Wade
Affiliation:
AT&T Bell Laboratories, Murray Hill, NJ 07974
K. Bolan
Affiliation:
AT&T Bell Laboratories, Murray Hill, NJ 07974
Get access

Abstract

The bulge test provides a convenient way to measure the mechanical properties, including fracture strength, of thin ceramic membranes. Thin (≈ 3000Å) films of non-stoichiometric SiNx, nominally defect-free and containing flaws introduced byfocused ion-beam machining, were examined. The use of such membranes in masks for projection electron-beam lithography systems makes it important to determine their ultimate strength and reliability. The mean fracture strength of the defect-free membranes was found to be 1.79±0.04GPa, and the Weibull modulus was estimated to be 49±15, giving a safe operating stress of 1.5GPa. The results of fracturing the samples containing flaws indicated that holes smaller than 15x0.5μm had no effect on the fracture strength of the membranes. By estimating the stress concentration factor for the slots, it was determined that the critical fracture stress was 16±3GPa.

Type
Research Article
Copyright
Copyright © Materials Research Society 1994

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

1. Berger, S.D. and Gibson, J.M., Appl. Phys. Lett. 57, 153 (1990).Google Scholar
2. Beams, J.W., in Structure and Properties of Thin Films, edited by Neugebauer, C.A., Newkirk, J.B. and Vermilyea, D.A. (John Wiley and Sons, New York, 1959), p. 183.Google Scholar
3. Vlassak, J.J. and Nix, W.D., J. Mater. Res., 7, 32423249 (1992).Google Scholar
4. Small, M.K. and Nix, W.D., J. Mater. Res., 7, 15531563 (1992).Google Scholar
5.See, for example, Jayatilaka, A. de S., Fracture of Engineering Brittle Materials (Applied Science Publishers Ltd, Barking, England, 1979), p. 122.Google Scholar
6. Pampuch, R., Constitution and Properties of Ceramic Materials, Materials Science Monographs, 58 (Elsevier, Amsterdam, 1991), p. 231.Google Scholar
7. Muto, Y., Yamaishi, K., Miyahara, N. and Oikawa, T., in Fracture Mechanics of Ceramics, 10, edited by Bradt, R.C. (Plenum Press, New York, 1992), p. 427.Google Scholar
8.See, for example, Peterson, R.E., Stress Concentration Factors (John Wiley and Sons, New York, 1974), p. 36.Google Scholar