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Filtered Cathodic Arc Deposited Diamond-Like Carbon: Electron Spin Resonance (ESR) and Raman Spectroscopy

Published online by Cambridge University Press:  10 February 2011

B. Druz ,
I. Zaritskiy ,
Y. Yevtukhov ,
A. Konchits ,
M. Valakh ,
S. Kolesnik ,
B. Shanina  and
V. Visotski
B. Druz
Affiliation:
Veeco Instruments, Inc., Terminal Drive, Plainview, NY 11803
I. Zaritskiy
Affiliation:
Veeco Instruments, Inc., Terminal Drive, Plainview, NY 11803
Y. Yevtukhov
Affiliation:
Veeco Instruments, Inc., Terminal Drive, Plainview, NY 11803
A. Konchits
Affiliation:
Institute of Semiconductor Physics, 45 Prospect Nauki, Kiev 252650, Ukraine
M. Valakh
Affiliation:
Institute of Semiconductor Physics, 45 Prospect Nauki, Kiev 252650, Ukraine
S. Kolesnik
Affiliation:
Institute of Semiconductor Physics, 45 Prospect Nauki, Kiev 252650, Ukraine
B. Shanina
Affiliation:
Institute of Semiconductor Physics, 45 Prospect Nauki, Kiev 252650, Ukraine
V. Visotski
Affiliation:
Institute of Semiconductor Physics, 45 Prospect Nauki, Kiev 252650, Ukraine
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Abstract

Tetrahedral diamond like carbon (ta-C) films were deposited onto Si substrates using Filtered Cathodic Vacuum Arc (FCVA) process. Stress of deposited films was varied in the range 3.5÷8.5 GPa. The ESR (stationary and pulse) and Raman techniques were used to analyze sp2 related defects in the pseudo-gap of undoped, as deposited 20 – 100 nm thick films. The results are compared with data for direct ion beam deposited from CH4 plasma hydrogenated DLHC films and nature of paramagnetic defects in DLC is discussed.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 593: Symposium U – Amorphous & Nanostructured Carbon , 1999 , 249
Copyright
Copyright © Materials Research Society 2000

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References

Refernces

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