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Published online by Cambridge University Press: 01 February 2011
In this investigation, Schottky diodes with different device sizes (150μm, 420μm and 700μm) were fabricated on the Ga-face of a free-standing n--GaN wafer produced by Kyma Technologies, Inc. Full area back side ohmic contact was prepared on the N-face of the bulk GaN using Ti/Al. Without any edge-termination scheme, a relatively high reverse breakdown voltage of 240V was achieved. The reverse breakdown voltage decreases as the device size increases. The forward turn-on voltage was as low as 2.4V at room temperature for the 150μm diameter Schottky diodes. The best on-state resistance was 7.56 mΩcm2 for diodes with VB=240V, producing a figure-of-merit (VB2/RON) of 7.6 MWcm-2. The Schottky diode also showed an extremely short reverse recovery time (< 20 ns) switching from forward bias to reverse bias.