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MRS Online Proceedings Library (OPL) MRS Online Proceedings Library (OPL)

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Electrodeposition of High-Tc Superconductor Material for Microsensor Fabrication

Published online by Cambridge University Press:  10 February 2011

A. Natarajan ,
W. Wang ,
E. Ma ,
R. N. Bhattacharya ,
C. Khan-Malek ,
M. Paranthaman  and
P. M. Martin
A. Natarajan
Affiliation:
Microsystems Engineering Team (μ-SET), Department of Mechanical Engineering, Louisiana, State University, Baton Rouge, LA 70803
W. Wang
Affiliation:
Microsystems Engineering Team (μ-SET), Department of Mechanical Engineering, Louisiana, State University, Baton Rouge, LA 70803
E. Ma
Affiliation:
Microsystems Engineering Team (μ-SET), Department of Mechanical Engineering, Louisiana, State University, Baton Rouge, LA 70803
R. N. Bhattacharya
Affiliation:
National Renewable Energy Laboratory, 1617 Cole Boulevard, Golden, CO 80401
C. Khan-Malek
Affiliation:
Center for Advanced Microstructures and Devices, Louisiana State University, Baton Rouge, LA 70803
M. Paranthaman
Affiliation:
Oak Ridge National Laboratory, Oak Ridge, TN 37831
P. M. Martin
Affiliation:
Oak Ridge National Laboratory, Oak Ridge, TN 37831
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Abstract

Thin-films of YBa2Cu3O7 (YBCO) superconductor precursor were synthesized using an electrodeposition process. The YBCO precursor thin films were deposited on Ag foils using pulsed potential deposition conditions of 10 s at - 4 V and 10 s at -1 V (versus Ag reference electrode). The post-annealed films showed zero electrical resistance at 60 K. The procedures for the fabrication of a high precision micro-sensor using YBCO superconductor for measurement of weak magnetic fields are outlined. The micro-sensor templates were patterned using X-rays and precursor films were deposited into the features.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 451: Symposium P – Electrochemical Synthesis and Modification , 1996 , 401
Copyright
Copyright © Materials Research Society 1997

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