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Electrical and Structural Diagnostics of Barium Strontium Titanate (BST) Thin Films

Published online by Cambridge University Press:  23 March 2011

Supriya Ketkar ,
Manoj Kumar Ram ,
Ashok Kumar ,
Thomas Weller  and
Andrew Hoff
Supriya Ketkar
Affiliation:
Department of Electrical Engineering, University of South Florida, Tampa, Fl 33620
Manoj Kumar Ram
Affiliation:
Department of Mechanical Engineering, University of South Florida, Tampa, Fl 33620 Nanotechnology Research and Education Center, University of South Florida, Tampa, Fl 33620
Ashok Kumar
Affiliation:
Department of Mechanical Engineering, University of South Florida, Tampa, Fl 33620 Nanotechnology Research and Education Center, University of South Florida, Tampa, Fl 33620
Thomas Weller
Affiliation:
Department of Electrical Engineering, University of South Florida, Tampa, Fl 33620
Andrew Hoff
Affiliation:
Department of Electrical Engineering, University of South Florida, Tampa, Fl 33620
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Abstract

The properties of radio frequency, rf magnetron sputtered Barium Strontium Titanate (Ba1-xSrxTiO3), BST, thin films were investigated and compared with BST thin films deposited by sol-gel method with the aim of determining relationships between the oxide deposition parameters, the film structure, and the electric field dependence. This work presents noncontact electrical characterization of BST films using Corona Kelvin metrology (C-KM) which has been employed earlier only in the silicon industry. The films were structurally characterized using thickness profilometer, X-ray diffraction (XRD) and atomic force microscopy (AFM) techniques. The use of sol-gel technique to fabricate small area metal-insulator-metal (MIM) structures is found to be beneficial from the point of saving fabrication time and production costs.

Keywords

sol-gelsputteringferroelectric
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 1292: Symposium K – Oxide Nanoelectronics , 2011 , mrsf10-1292-k12-23
Copyright
Copyright © Materials Research Society 2011

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References

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