Skip to main content Accessibility help
×
Home
Hostname: page-component-5d6d958fb5-9cwrl Total loading time: 0.151 Render date: 2022-11-29T08:46:31.582Z Has data issue: true Feature Flags: { "shouldUseShareProductTool": true, "shouldUseHypothesis": true, "isUnsiloEnabled": true, "useRatesEcommerce": false, "displayNetworkTab": true, "displayNetworkMapGraph": false, "useSa": true } hasContentIssue true

Effects of Growth Parameters on Surface-morphological, Structural, Electrical and Optical Properties of AZO Films by RF Magnetron Sputtering

Published online by Cambridge University Press:  31 January 2011

Shou-Yi Kuo
Affiliation:
sykuo@mail.cgu.edu.tw, Chang Gung University, Department of Electronic Engineering, 259 Wen-Hwa 1st Road, Kweishan, Taoyuan 333, Taiwan, Tao-Yuan, 33302, Taiwan, Province of China
Wei-Ting Lin
Affiliation:
awleogod@yahoo.com.twsykuo@mail.cgu.edu.tw
Liann-Be Chang
Affiliation:
liann@mail.cgu.edu.tw, Chung-Sung institute of Science & Technology, Chemical Systems Research Division, Tao-Yuan, Taiwan, Province of China
Ming-Jer Jeng
Affiliation:
mjjeng@mail.cgu.edu.tw, Chang Gung University, Department of Electronic Engineering, 259 Wen-Hwa 1st Road, Kweishan, Taoyuan 333, Taiwan, Tao-Yuan, 33302, Taiwan, Province of China
Yong-Tian Lu
Affiliation:
gsykuo@yahoo.com, Chung-Sung institute of Science & Technology, Chemical Systems Research Division, Tao-Yuan, Taiwan, Province of China
Sung-Cheng Hu
Affiliation:
sch7728@seed.net.tw, Chung-Sung institute of Science & Technology, Chemical Systems Research Division, Tao-Yuan, Taiwan, Province of China
Get access

Abstract

500 nm-thick aluminum-doped zinc oxide (ZnO:Al) thin film is usually used as a front transparent conductive oxide (TCO) contact on photovoltaic devices, and for this application is often deposited by a reactive radio-frequency (r.f.) magnetron sputtering system from a ceramic target. This work reports on the preparation and characterization of AZO thin films on Corning 1737 glass substrates grown by reactive r.f.-magnetron sputtering from a ZnO ceramic target with 2 wt% Al content. It was found that the growth parameters, such as chamber pressure, working power, and deposition temperature, have significant influences on the properties of AZO films. According to the experimental results: (1) Films were polycrystalline showing a strong preferred c-axis orientation. (2) With increasing working power, the resistivity decreased, and mobility and the carrier concentration increased. (3) Lower deposition temperature leads to a decrease in resistivity, with 2.5×10-4 Ω-cm representing the lowest resistivity reached.

Type
Research Article
Copyright
Copyright © Materials Research Society 2010

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

1 Granqvist, C. G., Solar Energy Mater. Solar Cells 91, 1529 (2007).10.1016/j.solmat.2007.04.031CrossRefGoogle Scholar
2 Lee, Jae-Hyeong, Song, Jun-Tae, Thin Solid Films 516, 1377 (2008).10.1016/j.tsf.2007.03.078CrossRefGoogle Scholar
3 Latz, R., Michael, K., Scherer, M., Jpn. J. Appl. Phys. 30 (2A), L149 (1991).10.1143/JJAP.30.L149CrossRefGoogle Scholar
4 Mandal, S., Singha, R.K., Dhar, A., Ray, S.K., Mater. Res. Bull. 43, 244 (2007).10.1016/j.materresbull.2007.05.006CrossRefGoogle Scholar
5 Lee, Jaehyeong, Lee, Dongjin, Lim, Donggun, Yang, Keajoon, Thin Solid Films 515, 6094 (2007).10.1016/j.tsf.2006.12.099CrossRefGoogle Scholar
6 Szörényi, T., Laude, L.D., Bertóti, I., Kántor, Z., Geretovsky, Zs., J. Appl. Phys. 78, 6211 (1995).10.1063/1.360567CrossRefGoogle Scholar
7 Kluth, O., Schöpe, G., Rech, B., Menner, R., Oertel, M., Orgassa, K., Schock, H.W., Thin Solid Films 502, 311 (2006).10.1016/j.tsf.2005.07.313CrossRefGoogle Scholar
8 Nunes, P., Costa, D., Fortunato, E., Martins, R., Vacuum 64, 293 (2002).10.1016/S0042-207X(01)00323-2CrossRefGoogle Scholar
9 Lu, Y. M., Hwang, W. S., Liu, W. Y., Yang, J. S., Mater. Chem. Phys. 72, 269 (2001).10.1016/S0254-0584(01)00450-3CrossRefGoogle Scholar
10 Liu, W. F., Du, G. T., Sun, Y. F., Bian, J. M., Chang, Y., Yang, T. P., Chang, Y. C., Xu, Y. B., Applied Surface Science 253, 2999 (2007).10.1016/j.apsusc.2006.06.049CrossRefGoogle Scholar
11 Cullity, B.D., Elements of X-ray Diffraction, second ed., Addison Wesley, Reading, MA, 1978.Google Scholar

Save article to Kindle

To save this article to your Kindle, first ensure coreplatform@cambridge.org is added to your Approved Personal Document E-mail List under your Personal Document Settings on the Manage Your Content and Devices page of your Amazon account. Then enter the ‘name’ part of your Kindle email address below. Find out more about saving to your Kindle.

Note you can select to save to either the @free.kindle.com or @kindle.com variations. ‘@free.kindle.com’ emails are free but can only be saved to your device when it is connected to wi-fi. ‘@kindle.com’ emails can be delivered even when you are not connected to wi-fi, but note that service fees apply.

Find out more about the Kindle Personal Document Service.

Effects of Growth Parameters on Surface-morphological, Structural, Electrical and Optical Properties of AZO Films by RF Magnetron Sputtering
Available formats
×

Save article to Dropbox

To save this article to your Dropbox account, please select one or more formats and confirm that you agree to abide by our usage policies. If this is the first time you used this feature, you will be asked to authorise Cambridge Core to connect with your Dropbox account. Find out more about saving content to Dropbox.

Effects of Growth Parameters on Surface-morphological, Structural, Electrical and Optical Properties of AZO Films by RF Magnetron Sputtering
Available formats
×

Save article to Google Drive

To save this article to your Google Drive account, please select one or more formats and confirm that you agree to abide by our usage policies. If this is the first time you used this feature, you will be asked to authorise Cambridge Core to connect with your Google Drive account. Find out more about saving content to Google Drive.

Effects of Growth Parameters on Surface-morphological, Structural, Electrical and Optical Properties of AZO Films by RF Magnetron Sputtering
Available formats
×
×

Reply to: Submit a response

Please enter your response.

Your details

Please enter a valid email address.

Conflicting interests

Do you have any conflicting interests? *